%PDF-1.5%1 0 obj <> endobj 2 0 obj <>/Metadata 522 0 R>> endobj 3 0 obj <> endobj 4 0 obj <>/ExtGState<>>>/Group<>/Annots[32 0 R]/StructParents 0/Tabs/S>> endobj 5 0 obj <>stream 1 0 0 -1 0 841.90002441 cm q 1 0 0 1 36 36 cm /P <> BDC BT /FAAAAH 14 Tf 1 0 0 -1 26.76399994 20.62100029 Tm 0 g [(Development)] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.30200195 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.80200195 20.62100029 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.37399292 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.87399292 20.62100029 Tm [(Application)] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.88800049 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.38800049 20.62100029 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.05000305 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.55000305 20.62100029 Tm [(BEOL)] TJ ET EMC /P <> BDC BT 1 0 0 -1 262.45300293 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 265.95300293 20.62100029 Tm [(Polymer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 316.48400879 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 319.98400879 20.62100029 Tm [(Residue)] TJ ET EMC /P <> BDC BT 1 0 0 -1 367.43200684 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 370.93200684 20.62100029 Tm [(Removal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 423.80801392 20.62100029 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 427.30801392 20.62100029 Tm [(Technology)] TJ ET EMC /P <> BDC BT 1 0 0 -1 496.53601074 20.62100029 Tm /GS1 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 31.20000076 cm /P <> BDC BT /FAAABB 8 Tf 1 0 0 -1 33.78099823 8.46700001 Tm /GS2 gs 0 g [<0003>] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 38.61299896 12.10299969 Tm [(Ting)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.27700043 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.27700043 12.10299969 Tm [(Yao)] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.26899719 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 87.26899719 8.46700001 Tm [(1)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 91.26899719 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.26899719 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.26899719 12.10299969 Tm [(Yang)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.26100159 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.26100159 12.10299969 Tm [(Chen)] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.59100342 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 154.59100342 8.46700001 Tm [(1)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 158.59100342 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.59100342 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.59100342 12.10299969 Tm [(Wenjun)] TJ ET EMC /P <> BDC BT 1 0 0 -1 202.57699585 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.57699585 12.10299969 Tm [(Wang)] TJ ET EMC /P <> BDC BT 1 0 0 -1 234.22900391 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 237.22900391 8.46700001 Tm [(1)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 241.22900391 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 244.22900391 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 247.22900391 12.10299969 Tm [(Xiaoyan)] TJ ET EMC /P <> BDC BT 1 0 0 -1 287.88101196 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 290.88101196 12.10299969 Tm [(Zhang)] TJ ET EMC /P <> BDC BT 1 0 0 -1 321.5369873 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 324.5369873 8.46700001 Tm [(1)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 328.5369873 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 331.5369873 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 334.5369873 12.10299969 Tm [(Fuping)] TJ ET EMC /P <> BDC BT 1 0 0 -1 368.54501343 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 371.54501343 12.10299969 Tm [(Chen)] TJ ET EMC /P <> BDC BT 1 0 0 -1 396.875 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 399.875 8.46700001 Tm [(1)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 403.875 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 406.875 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 409.875 12.10299969 Tm [(David)] TJ ET EMC /P <> BDC BT 1 0 0 -1 439.20098877 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 442.20098877 12.10299969 Tm [(H.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 453.86700439 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 456.86700439 12.10299969 Tm [(Wang)] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 485.51901245 8.46700001 Tm [(1)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 489.51901245 12.10299969 Tm /GS3 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 46.79999924 cm /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 127.33100128 12.10299969 Tm /GS4 gs 0 g [(Dongqiang)] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.65699768 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.65699768 12.10299969 Tm [(Chen)] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 208.98699951 8.46700001 Tm [(2)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 212.98699951 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 215.98699951 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.98699951 12.10299969 Tm [(Sunny)] TJ ET EMC /P <> BDC BT 1 0 0 -1 249.66099548 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 252.66099548 12.10299969 Tm [(He)] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 266.65301514 8.46700001 Tm [(2)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 270.65301514 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 273.65301514 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 276.65301514 12.10299969 Tm [(Rock)] TJ ET EMC /P <> BDC BT 1 0 0 -1 301.98300171 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 304.98300171 12.10299969 Tm [(Xu)] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 319.64898682 8.46700001 Tm [(2)] TJ ET EMC /P <> BDC BT /FAAABG 12 Tf 1 0 0 -1 323.64898682 12.10299969 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 326.64898682 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 329.64898682 12.10299969 Tm [(Libbert)] TJ ET EMC /P <> BDC BT 1 0 0 -1 364.96899414 12.10299969 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 367.96899414 12.10299969 Tm [(Peng)] TJ ET EMC /P <> BDC BT /FAAABG 8 Tf 1 0 0 -1 391.96899414 8.46700001 Tm [(2)] TJ ET EMC /P <> BDC BT /FAAACB 12 Tf 1 0 0 -1 395.96899414 12.10299969 Tm /GS5 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 62.40000153 cm /P <> BDC BT /FAAACB 12 Tf 1 0 0 -1 261.6499939 11.90100002 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 78 cm /P <> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 141.59199524 8.35599995 Tm /GS6 gs 0 g [(1)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.84199524 8.35599995 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 146.46699524 11.38599968 Tm [(www.6163.com)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.25 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.75 11.38599968 Tm [(Research)] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.39599609 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.89599609 11.38599968 Tm [(\(Shanghai\),)] TJ ET EMC /P <> BDC BT 1 0 0 -1 257.27301025 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 259.77301025 11.38599968 Tm [(Inc.,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 277.54199219 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 280.04199219 11.38599968 Tm [(Pudong,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 313.10400391 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 315.60400391 11.38599968 Tm [(Shanghai,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 355.3210144 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 357.8210144 11.38599968 Tm [(China)] TJ ET EMC /P <> BDC BT /FAAACG 11 Tf 1 0 0 -1 381.70800781 11.38599968 Tm /GS7 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 93.59999847 cm /P <> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 120.89900208 8.35599995 Tm /GS8 gs 0 g [(2)] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.14900208 8.35599995 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 125.77400208 11.38599968 Tm [(Anji)] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.55200195 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.05200195 11.38599968 Tm [(Microele)1(ctronics)] TJ ET EMC /P <> BDC BT 1 0 0 -1 213.80099487 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 216.30099487 11.38599968 Tm [(\(Shanghai\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 260.17800903 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 262.67800903 11.38599968 Tm [(Co.,Ltd.,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 298.23498535 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 300.73498535 11.38599968 Tm [(Pudong,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 333.79699707 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 336.29699707 11.38599968 Tm [(Shanghai,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 376.01400757 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 378.51400757 11.38599968 Tm [(China)] TJ ET EMC /P <> BDC BT /FAAACG 11 Tf 1 0 0 -1 402.40100098 11.38599968 Tm /GS9 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 109.19999695 cm /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 129.42599487 11.38599968 Tm /GS10 gs 0 g [(E-mai)1(l:)] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.41600037 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.91600037 11.38599968 Tm 0 0 1 rg [(hedy.yao@a)1(cmrcsh.com)] TJ ET EMC /P <> BDC BT 1 0 0 -1 260.53399658 11.38599968 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 263.03399658 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 265.53399658 11.38599968 Tm [(dongqiangche)1(n@anjimi)1(cro.com)] TJ ET EMC /P <> BDC BT 1 0 0 -1 393.87399292 11.38599968 Tm /GS11 gs 0 g [( )] TJ ET EMC /P <> BDC q /GS12 gs 0 0 1 RG 0.5 w 161.91600037 12.76099968 m 393.87399292 12.76099968 l S Q EMC Q q 1 0 0 1 0 124.80000305 cm /P <> BDC BT /FAAADG 10 Tf 1 0 0 -1 0 11.21700001 Tm [( )] TJ ET EMC Q q 1 0 0 1 5.97700024 124.80000305 cm Q Q q 1 0 0 1 56.70000076 176.3999939 cm /P <> BDC BT /FAAAAH 11 Tf 1 0 0 -1 94.69599915 11.74499989 Tm 0 g [(Abstract)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.6289978 11.74499989 Tm /GS13 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 15.60000038 cm /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS14 gs 0 g [(Among)] TJ ET EMC /P <> BDC BT 1 0 0 -1 30 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.5 11.38599968 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.71699905 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.21699905 11.38599968 Tm [(techni)1(cal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.30599976 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.80599976 11.38599968 Tm [(nodes)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.13600159 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.63600159 11.38599968 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.85299683 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.35299683 11.38599968 Tm [(90nm)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.1309967 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.6309967 11.38599968 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.06900024 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 163.56900024 11.38599968 Tm [(below,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.50700378 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(copper/l)1(ow)-1(-k)] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.31499863 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.81499863 26.98600006 Tm [(interc)1(onnect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.23400116 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.73400116 26.98600006 Tm [(possesses)] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.06900024 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.56900024 26.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.78599548 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 163.28599548 26.98600006 Tm [(charac)1(teristics)] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.47399902 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 8.32999992 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 10.82999992 42.58599854 Tm [(falli)1(ng)] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.93399811 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.43399811 42.58599854 Tm [(resistive-c)1(apaciti)1(ve)] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.61699677 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.11699677 42.58599854 Tm [(\(RC\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.11700439 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.61700439 42.58599854 Tm [(delay,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.77200317 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.27200317 42.58599854 Tm [(low)] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.27200317 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(interc)1(onnect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.41899872 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.91899872 58.18599701 Tm [(resistance)] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.34300232 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.84300232 58.18599701 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.28099823 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.78099823 58.18599701 Tm [(high)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.55900574 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.05900574 58.18599701 Tm [(relia)1(bility,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.43600464 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.93600464 58.18599701 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 199.37399292 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.87399292 58.18599701 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.54400635 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(commonl)1(y)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.77299881 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.27299881 73.78600311 Tm [(used)] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.60300064 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.10299683 73.78600311 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.8809967 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.3809967 73.78600311 Tm [(replac)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.24299622 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.74299622 73.78600311 Tm [(tradit)1(ional)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.84199524 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.34199524 73.78600311 Tm [(alumi)1(num/silicon)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.33700562 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(dioxide)] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.99500084 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.49499893 89.38600159 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.27299881 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.77299881 89.38600159 Tm [(interc)1(onnection)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.97000122 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.47000122 89.38600159 Tm [(technol)1(ogy.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.40400696 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 156.90400696 89.38600159 Tm [(Since)] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.1210022 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.6210022 89.38600159 Tm [(copper)] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.82800293 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(cannot)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.65500069 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.15500069 104.98600006 Tm [(react)] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.57899857 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.07899857 104.98600006 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.85700226 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.35700226 104.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.5739975 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.0739975 104.98600006 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.72899628 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.22899628 104.98600006 Tm [(gas)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.55899811 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.05899811 104.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.83700562 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.33700562 104.98600006 Tm [(form)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.7749939 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.2749939 104.98600006 Tm [(volati)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.26499939 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.76499939 104.98600006 Tm [(by-)] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(products,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.93799973 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.43799973 120.58599854 Tm [(copper)] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.64499664 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.14499664 120.58599854 Tm [(meta)1(llizat)1(ion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.34700012 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.84700012 120.58599854 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.51699829 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.01699829 120.58599854 Tm [(unsuitable)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.1210022 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.6210022 120.58599854 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.28100586 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.78100586 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 202.9980011 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(process)] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.98999977 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.49000168 136.18600464 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.81999969 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.31999969 136.18600464 Tm [(dry)] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.65000153 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.15000153 136.18600464 Tm [(etchi)1(ng,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.08399963 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.58399963 136.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.02200317 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.52200317 136.18600464 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.73899841 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.23899841 136.18600464 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.10099792 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.60099792 136.18600464 Tm [(integra)1(tion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.92100525 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(scheme)] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.98500061 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.48500061 151.78599548 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.15499878 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.65499878 151.78599548 Tm [(used)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.98500061 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.48500061 151.78599548 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.14499664 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.64499664 151.78599548 Tm [(BEOL)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.75299835 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.25299835 151.78599548 Tm [(interc)1(onnection.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.94999695 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.44999695 151.78599548 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.99699402 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.49699402 151.78599548 Tm [(wet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.93499756 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.38600159 Tm [(chemi)1(s)-1(t)1(ry)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.43399811 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.93399811 167.38600159 Tm [(post-etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.58899689 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.08899689 167.38600159 Tm [(clea)1(n)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.18299866 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.68299866 167.38600159 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.35299683 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.85299683 167.38600159 Tm [(an)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.29100037 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.79100037 167.38600159 Tm [(essential)] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.2250061 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.7250061 167.38600159 Tm [(step)] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.83299255 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.33299255 167.38600159 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.11099243 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.61099243 167.38600159 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.82800293 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.86199951 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.36199951 182.98600769 Tm [(technol)1(ogy,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.29599762 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.79599762 182.98600769 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.23400116 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.73400116 182.98600769 Tm [(it)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.29100037 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 120.79100037 182.98600769 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.46099854 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.96099854 182.98600769 Tm [(primari)1(ly)] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.17300415 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.67300415 182.98600769 Tm [(used)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.00300598 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.50300598 182.98600769 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.28100586 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 198.58599854 Tm [(eradic)1(ate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.07899857 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.57899857 198.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.79600143 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.29600143 198.58599854 Tm [(post)] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.96600342 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 72.46600342 198.58599854 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.1210022 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.6210022 198.58599854 Tm [(residue.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.9980011 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.4980011 198.58599854 Tm [(Throughout)] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.71499634 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.21499634 198.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.43200684 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.93200684 198.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.80400085 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 214.18600464 Tm [(process,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.49000168 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.99000168 214.18600464 Tm [(low-k,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 60.81999969 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.31999969 214.18600464 Tm [(Cu,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.48999786 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.98999786 214.18600464 Tm [(Ta/T)1(aN)] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.08399963 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.58399963 214.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.02200317 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.52200317 214.18600464 Tm [(other)] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.06900024 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.56900024 214.18600464 Tm [(films)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.12600708 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.62600708 214.18600464 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.40400696 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 229.78599548 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.86199951 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.36199951 229.78599548 Tm [(will)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.91899872 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.41899872 229.78599548 Tm [(be)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.85700226 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.35700226 229.78599548 Tm [(exposed.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.62599945 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.12599945 229.78599548 Tm [(Consequently,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.6210022 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.1210022 229.78599548 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 186.33799744 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.83799744 229.78599548 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.71000671 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 245.38600159 Tm [(solution)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.22700119 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.72700119 245.38600159 Tm [(must)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.17499924 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.67499924 245.38600159 Tm [(do)] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.67500305 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.17500305 245.38600159 Tm [(less)] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.17500305 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.67500305 245.38600159 Tm [(damage)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.76899719 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 120.26899719 245.38600159 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.04699707 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.54699707 245.38600159 Tm [(numerous)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.98500061 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.48500061 245.38600159 Tm [(mate)1(rials.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.63499451 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.13499451 245.38600159 Tm [(In)] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.46499634 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 260.98599243 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.44799995 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.94799995 260.98599243 Tm [(work,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.5 260.98599243 Tm [(two)] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.5 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 60 260.98599243 Tm [(types)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.10800171 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.60800171 260.98599243 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.93800354 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.43800354 260.98599243 Tm [(semi-aque)1(ous)] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.42300415 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.92300415 260.98599243 Tm [(wet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 166.36099243 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.86099243 260.98599243 Tm [(clea)1(n)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.95500183 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 276.58599854 Tm [(chemi)1(cals)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.97999954 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.47999954 276.58599854 Tm [(\(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 72.48000336 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.98000336 276.58599854 Tm [(from)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.41799927 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.91799927 276.58599854 Tm [(ATMI)] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.47000122 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.97000122 276.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.40800476 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.90800476 276.58599854 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.47000122 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.97000122 276.58599854 Tm [(from)] TJ ET EMC /P <> BDC BT 1 0 0 -1 199.40800476 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.90800476 276.58599854 Tm [(Anji\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.01600647 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 292.18597412 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.20699978 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.70699978 292.18597412 Tm [(tested)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.0320015 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.5320015 292.18597412 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.31000137 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.81000137 292.18597412 Tm [(www.6163.com)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.59300232 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.09300232 292.18597412 Tm [(300mm)] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.65000153 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.15000153 292.18597412 Tm [(single)] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.03700256 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.53700256 292.18597412 Tm [(clea)1(n)] TJ ET EMC /P <> BDC BT 1 0 0 -1 156.6309967 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.1309967 292.18597412 Tm [(tool.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.18800354 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.68800354 292.18597412 Tm [(In)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.01800537 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.51800537 292.18597412 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 202.73500061 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.23500061 292.18597412 Tm [(past,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.84300232 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 307.78598022 Tm [(many)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.21699905 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.71699905 307.78598022 Tm [(factori)1(es)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.14099884 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.64099884 307.78598022 Tm [(struggled)] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.85800171 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.35800171 307.78598022 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.13600159 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.63600159 307.78598022 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.85299683 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.35299683 307.78598022 Tm [(ball-t)1(ype)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.89500427 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.39500427 307.78598022 Tm [(defect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 202.71000671 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.21000671 307.78598022 Tm [(when)] TJ ET EMC /P <> BDC BT 1 0 0 -1 226.86999512 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 323.38598633 Tm [(using)] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.67000008 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.17000008 323.38598633 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.84000015 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.34000015 323.38598633 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.66999817 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.16999817 323.38598633 Tm [(post)] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.83999634 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.33999634 323.38598633 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.99500275 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.49500275 323.38598633 Tm [(polymer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.82000732 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.32000732 323.38598633 Tm [(remover.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.13499451 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.63499451 323.38598633 Tm [(We)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.51199341 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.01199341 323.38598633 Tm [(keep)] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.88900757 323.38598633 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 338.98599243 Tm [(addressing)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.76900101 338.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.26900101 338.98599243 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.48600006 338.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.98600006 338.98599243 Tm [(ball-t)1(ype)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.52799988 338.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.02799988 338.98599243 Tm [(defect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.34300232 338.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.84300232 338.98599243 Tm [(by)] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.84300232 338.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.34300232 338.98599243 Tm [(proposing)] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.34300232 338.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.84300232 338.98599243 Tm [(one)] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.28100586 338.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 354.58599854 Tm [(possible)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.77799988 354.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.27799988 354.58599854 Tm [(failure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.37200165 354.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.87200165 354.58599854 Tm [(mecha)1(nism)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.41400146 354.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.91400146 354.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.35199738 354.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.852005 354.58599854 Tm [(presenting)] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.50700378 354.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.00700378 354.58599854 Tm [(several)] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.32200623 354.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 370.18597412 Tm [(solutions.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.61800003 370.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.11800003 370.18597412 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.66500092 370.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.16500092 370.18597412 Tm [(photo-assistant)] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.16000366 370.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.66000366 370.18597412 Tm [(copper)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.86700439 370.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.36700439 370.18597412 Tm [(corrosion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.13600159 370.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.63600159 370.18597412 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.07400513 370.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 385.78598022 Tm [(potenti)1(al)] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.99000168 385.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.49000168 385.78598022 Tm [(chemi)1(cal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.57900238 385.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.07900238 385.78598022 Tm [(residue)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.95600128 385.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.45600128 385.78598022 Tm [(problem)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.78100586 385.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.28100586 385.78598022 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.48800659 385.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.98800659 385.78598022 Tm [(also)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.09599304 385.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.59599304 385.78598022 Tm [(discussed.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 217.42599487 385.78598022 Tm /GS15 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 405.6000061 cm /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 421.20001221 cm /P <> BDC BT 1 0 0 -1 0 11.74499989 Tm /GS16 gs 0 g [(1.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 8.25 11.74499989 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 11 11.74499989 Tm [(Introduction)] TJ ET EMC /P <> BDC BT 1 0 0 -1 70.89800262 11.74499989 Tm /GS17 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 436.79998779 cm /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS18 gs 0 g [(Wet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.65500069 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.15500069 11.38599968 Tm [(chemi)1(s)-1(t)1(ry)] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.5890007 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.0890007 11.38599968 Tm [(post-etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.7440033 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.2440033 11.38599968 Tm [(clea)1(n)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.33799744 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.83799744 11.38599968 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.50799561 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.00799561 11.38599968 Tm [(vital)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.78100586 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.28100586 11.38599968 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.05900574 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 163.55900574 11.38599968 Tm [(BEOL)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.66700745 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.16700745 11.38599968 Tm [(process.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 224.65699768 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(At)] TJ ET EMC /P <> BDC BT 1 0 0 -1 10 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.5 26.98600006 Tm [(almost)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.16500092 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.66500092 26.98600006 Tm [(every)] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.87200165 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.37200165 26.98600006 Tm [(few)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.36199951 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.86199951 26.98600006 Tm [(steps)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.86199951 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.36199951 26.98600006 Tm [(during)] TJ ET EMC /P <> BDC BT 1 0 0 -1 132.47000122 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.97000122 26.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.18699646 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.68699646 26.98600006 Tm [(procedure,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.16299438 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.66299438 26.98600006 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 228.53500366 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 6.67000008 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 9.17000008 42.58599854 Tm [(involved.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.66500092 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.16500092 42.58599854 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.71199799 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.21199799 42.58599854 Tm [(qualit)1(y)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.98500061 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.48500061 42.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.81500244 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.31500244 42.58599854 Tm [(silicon)] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.97999573 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.47999573 42.58599854 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.23899841 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.73899841 42.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.61099243 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 199.11099243 42.58599854 Tm [(direct)1(ly)] TJ ET EMC /P <> BDC BT 1 0 0 -1 229.65299988 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(impac)1(ts)] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.10400009 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 33.60400009 58.18599701 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.82099915 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.32099915 58.18599701 Tm [(device)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.63600159 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.13600159 58.18599701 Tm [(yield)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.1309967 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.6309967 58.18599701 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.06900024 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.56900024 58.18599701 Tm [(relia)1(bility.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.94599915 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.44599915 58.18599701 Tm [(According)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.65299988 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.15299988 58.18599701 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.93099976 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(C.F.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 17.2310009 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.7310009 73.78600311 Tm [(Tsang)] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.16899872 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.66899872 73.78600311 Tm [(et)] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.88600159 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.38600159 73.78600311 Tm [(al,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.10299683 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.60299683 73.78600311 Tm [(there)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.58799744 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.08799744 73.78600311 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.29499817 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.79499817 73.78600311 Tm [(three)] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.77999878 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.27999878 73.78600311 Tm [(main)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.2749939 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.7749939 73.78600311 Tm [(wet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.21299744 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.71299744 73.78600311 Tm [(clea)1(n)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.80700684 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.30700684 73.78600311 Tm [(processes)] TJ ET EMC /P <> BDC BT 1 0 0 -1 229.6269989 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.43799973 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.93799973 89.38600159 Tm [(involve)] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.93299866 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.43299866 89.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.65000153 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.15000153 89.38600159 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.36699677 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.86699677 89.38600159 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.72900391 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.22900391 89.38600159 Tm [(structure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.21400452 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.71400452 89.38600159 Tm [(formati)1(on.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.647995 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(These)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.87700081 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.37700081 104.98600006 Tm [(steps)] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.3769989 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.8769989 104.98600006 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.08399963 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.58399963 104.98600006 Tm [(post-via)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.8010025 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.3010025 104.98600006 Tm [(etch,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.45600128 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.95600128 104.98600006 Tm [(post-trench)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.94099426 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.44099426 104.98600006 Tm [(etch,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 186.59599304 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.09599304 104.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.53399658 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.03399658 104.98600006 Tm [(post)] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.70399475 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(Cu)] TJ ET EMC /P <> BDC BT 1 0 0 -1 11.67000008 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.17000008 120.58599854 Tm [(cap)] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.04700089 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.54700089 120.58599854 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.20199966 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.70199966 120.58599854 Tm [(respecti)1(vely)] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.01300049 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.51300049 120.58599854 Tm [([1])] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.17299652 120.58599854 Tm [(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.67299652 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.17299652 120.58599854 Tm [(By)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.84300232 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.34300232 120.58599854 Tm [(undergoing)] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.88999939 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.38999939 120.58599854 Tm [(dry)] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.72000122 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.22000122 120.58599854 Tm [(etch,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.375 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 216.875 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 229.09199524 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(by-products)] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.76900101 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.26900101 136.18600464 Tm [(such)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.59899902 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.09899902 136.18600464 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.42900085 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.92900085 136.18600464 Tm [(CF)] TJ ET EMC /P <> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 94.16000366 137.68600464 Tm [(x)] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 97.04499817 136.18600464 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.54499817 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.04499817 136.18600464 Tm [(CuF)] TJ ET EMC /P <> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 119.27600098 137.68600464 Tm [(x)] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 122.16100311 136.18600464 Tm [(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.66100311 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.16100311 136.18600464 Tm [(CuO,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.55299377 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.05299377 136.18600464 Tm [(Cu)] TJ ET EMC /P <> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 162.7230072 137.68600464 Tm [(x)] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 165.60800171 136.18600464 Tm [(O,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.33000183 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.83000183 136.18600464 Tm [(polymeri)1(c)] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.37199402 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(residues)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.76900101 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.26900101 151.78599548 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.70700073 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.20700073 151.78599548 Tm [(re-sputtere)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.96099854 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.46099854 151.78599548 Tm [(Cu)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.1309967 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.6309967 151.78599548 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.83799744 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.33799744 151.78599548 Tm [(formed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.21499634 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.71499634 151.78599548 Tm [([2])] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.375 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.875 151.78599548 Tm [([3])] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.53500366 151.78599548 Tm [(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.03500366 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.38600159 Tm [(Generall)1(y,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.92399979 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.42399979 167.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.64099884 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.14099884 167.38600159 Tm [(wafers)] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.1210022 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.6210022 167.38600159 Tm [(contam)1(ination)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.82800293 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.32800293 167.38600159 Tm [(from)] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.76600647 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.26600647 167.38600159 Tm [(by-products)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.03500366 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.53500366 167.38600159 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.20500183 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(usually)] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.88699913 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.38699913 182.98600769 Tm [(inevit)1(able.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.31600189 182.98600769 Tm /GS19 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 251.57499695 0 cm /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC q 1 0 0 1 0 15.60000038 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS20 gs 0 g [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 15.54699993 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 18.04700089 11.38599968 Tm [(single-wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.02300262 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 70.52300262 11.38599968 Tm [(spin)] TJ ET EMC /P <> BDC BT 1 0 0 -1 87.19300079 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.69300079 11.38599968 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.56500244 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.06500244 11.38599968 Tm [(tool)] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.62199402 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.12199402 11.38599968 Tm [(\(Ultra)] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.99899292 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.49899292 11.38599968 Tm [(C)] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.16900635 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.66900635 11.38599968 Tm [(II)] TJ ET EMC /P <> BDC BT 1 0 0 -1 186.32899475 11.38599968 Tm [(\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.65899658 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.15899658 11.38599968 Tm [(used)] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.48899841 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.98899841 11.38599968 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.76699829 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.44799995 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.94799995 26.98600006 Tm [(artic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.9280014 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.4280014 26.98600006 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.09799957 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.59799957 26.98600006 Tm [(made)] TJ ET EMC /P <> BDC BT 1 0 0 -1 75.25299835 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.75299835 26.98600006 Tm [(by)] TJ ET EMC /P <> BDC BT 1 0 0 -1 87.75299835 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.25299835 26.98600006 Tm [(www.6163.com)] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.03600311 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.53600311 26.98600006 Tm [(Research,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.68200684 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.18200684 26.98600006 Tm [(Inc.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.45100403 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.95100403 26.98600006 Tm [(This)] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.72900391 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.22900391 26.98600006 Tm [(product)] TJ ET EMC /P <> BDC BT 1 0 0 -1 225.77600098 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(has)] TJ ET EMC /P <> BDC BT 1 0 0 -1 13.32999992 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 15.82999992 42.58599854 Tm [(8)] TJ ET EMC /P <> BDC BT 1 0 0 -1 20.82999992 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.32999992 42.58599854 Tm [(chambe)1(rs)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.64500046 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.14499664 42.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.58300018 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.08300018 42.58599854 Tm [(each)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.39800262 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.89800262 42.58599854 Tm [(chambe)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.32200623 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.82200623 42.58599854 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 145.49200439 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.99200439 42.58599854 Tm [(configured)] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.30700684 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.80700684 42.58599854 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.58500671 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(four)] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.65999985 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.15999985 58.18599701 Tm [(chemi)1(cals)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.13999939 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.63999939 58.18599701 Tm [(-)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.97000122 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.47000122 58.18599701 Tm [(Main)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.57800293 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.07800293 58.18599701 Tm [(chemi)1(cal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.16699982 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.66700745 58.18599701 Tm [(\(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.66700745 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.16700745 58.18599701 Tm [(or)] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.49699402 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.99699402 58.18599701 Tm [(ICS8000\),)] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.38900757 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(DHF,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.50499916 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.00499916 73.78600311 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.22200012 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.72200012 73.78600311 Tm [(fluid)] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.60900116 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.10900116 73.78600311 Tm [(spray)] TJ ET EMC /P <> BDC BT 1 0 0 -1 87.76899719 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.26899719 73.78600311 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.70700073 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.20700073 73.78600311 Tm [(CO)] TJ ET EMC /P <> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 121.09899902 75.28600311 Tm [(2)] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 124.34899902 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.84899902 73.78600311 Tm [(gasified)] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.5039978 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.0039978 73.78600311 Tm [(DI)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.55599976 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.05599976 73.78600311 Tm [(water.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.76300049 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.26300049 73.78600311 Tm [(Two)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.59300232 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(kinds)] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.67000008 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.17000008 89.38600159 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.5 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35 89.38600159 Tm [(post-etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.65499878 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.15499878 89.38600159 Tm [(clea)1(n)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.24900055 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.74900055 89.38600159 Tm [(chemi)1(cals)] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.72900391 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.22900391 89.38600159 Tm [(\(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.22900391 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.72900391 89.38600159 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.16700745 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.66700745 89.38600159 Tm [(ICS8000\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 228.55900574 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.20699978 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.70699978 104.98600006 Tm [(tested)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.0320015 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.5320015 104.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.97000122 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.47000122 104.98600006 Tm [(discussed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.80000305 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.30000305 104.98600006 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.07800293 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.57800293 104.98600006 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.02600098 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.52600098 104.98600006 Tm [(artic)1(le.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.0059967 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.5059967 104.98600006 Tm [(Both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.95399475 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.45399475 104.98600006 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.12399292 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.62399292 104.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.06199646 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.56200027 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.06200027 120.58599854 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.26900101 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.76900101 120.58599854 Tm [(fluorine-ba)1(s)-1(e)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.52300262 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.02300262 120.58599854 Tm [(semi-aque)1(ous)] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.00799561 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.50799561 120.58599854 Tm [(strippers)] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.94599915 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 207.44599915 120.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.88400269 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(designed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.54700089 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.04700089 136.18600464 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.70700073 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.20700073 136.18600464 Tm [(Cu)] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.8769989 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.3769989 136.18600464 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.23899841 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.73899841 136.18600464 Tm [(clea)1(ning.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.11099243 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.61099243 136.18600464 Tm [(However,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.76100159 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.26100159 136.18600464 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.59100342 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.09100342 136.18600464 Tm [(shown)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.20399475 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 7.77799988 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 10.27799988 151.78599548 Tm [(Table)] TJ ET EMC /P <> BDC BT 1 0 0 -1 33.04199982 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.54199982 151.78599548 Tm [(1,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.04199982 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.54199982 151.78599548 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.10399628 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.60399628 151.78599548 Tm [(feature)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.25 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.75 151.78599548 Tm [(lower)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.51899719 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.01899719 151.78599548 Tm [(viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.57600403 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.07600403 151.78599548 Tm [(compare)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.5 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.47200012 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 17.77799988 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 20.27799988 167.47200012 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.94800186 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.44800186 167.47200012 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.22599792 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.72599792 167.47200012 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.94300079 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.44300079 167.47200012 Tm [(room)] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.5510025 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.0510025 167.47200012 Tm [(tempe)1(rature)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.80000305 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.30000305 167.47200012 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.73800659 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.23800659 167.47200012 Tm [(40)] TJ ET EMC /P <> BDC BT /FAAAFA 10 Tf 1 0 0 -1 180.23800659 167.47200012 Tm [<0003>] TJ ET EMC /P <> BDC BT /FAAAFE 10 Tf 1 0 0 -1 190.23800659 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 195.23800659 167.47200012 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.67599487 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.17599487 167.47200012 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 228.84599304 167.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.21700001 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.71700001 182.98600769 Tm [(typica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.92900085 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.42900085 182.98600769 Tm [(process)] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.41899872 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.91899872 182.98600769 Tm [(tempe)1(rature.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.16799927 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.66799927 182.98600769 Tm [(It)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.77600098 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.27600098 182.98600769 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.94599915 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.44599915 182.98600769 Tm [(expect)1(ed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.97799683 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.47799683 182.98600769 Tm [(that)] TJ ET EMC /P <> BDC BT 1 0 0 -1 200.4730072 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 198.58599854 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.56200027 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.06200027 198.58599854 Tm [(can)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.93899918 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.43899918 198.58599854 Tm [(be)] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.8769989 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.3769989 198.58599854 Tm [(rinsed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.81500244 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.31500244 198.58599854 Tm [(off)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.97499847 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.47499847 198.58599854 Tm [(by)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.47499847 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.97499847 198.58599854 Tm [(ultrapure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 156.06900024 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.56900024 198.58599854 Tm [(water)] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.77600098 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.27600098 198.58599854 Tm [(more)] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.82299805 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 214.18600464 Tm [(effici)1(ently)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.0890007 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.5890007 214.18600464 Tm [(compare)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.01300049 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.51300049 214.18600464 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.29100037 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.79100037 214.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.00800323 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 120.50800323 214.18600464 Tm [(viscous)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.50799561 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.00799561 214.18600464 Tm [(ST250,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.17799377 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.67799377 214.18600464 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.11599731 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.61599731 214.18600464 Tm [(may)] TJ ET EMC /P <> BDC BT 1 0 0 -1 228.83299255 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 229.78599548 Tm [(contribut)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.54199982 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.04199982 229.78599548 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.81999969 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.31999969 229.78599548 Tm [(shorter)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.08899689 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.58899689 229.78599548 Tm [(rinse)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.02700043 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.52700043 229.78599548 Tm [(tim)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.30000305 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.80000305 229.78599548 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.23800659 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.73800659 229.78599548 Tm [(bette)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.5019989 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.0019989 229.78599548 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 197.98199463 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 245.38600159 Tm [(performanc)1(e.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.02199936 245.38600159 Tm /GS21 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 265.20001221 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 280.79998779 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS22 gs 0 g [(Table)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.76399994 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.63100052 11.38599968 Tm [(1.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.13100052 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.9980011 11.38599968 Tm [(Viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.77600098 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.64299774 11.38599968 Tm [(compari)1(s)-1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.29800415 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.16499329 11.38599968 Tm [(between)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.47999573 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.34700012 11.38599968 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.01699829 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 215.88400269 11.38599968 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32200623 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.56200027 26.98600006 Tm /GS23 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 -2.38700008 312 cm q -1 0 m 128.55000305 0 l 128.55000305 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <> BDC BT 1 0 0 -1 58.375 11.38599968 Tm [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 0 m 50.59999847 0 l 50.59999847 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 5.78399992 11.38599968 Tm /GS24 gs 0 g [(ST250)] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 33.01499939 11.38599968 Tm /GS25 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 0 m 58.95000076 0 l 58.95000076 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 5.23699999 11.38599968 Tm /GS26 gs 0 g [(ICS8000)] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 41.91199875 11.38599968 Tm /GS27 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 0 16.60000038 cm q -1 -1 m 128.55000305 -1 l 128.55000305 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 3.34699988 11.47200012 Tm /GS28 gs 0 g [(Viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.67699814 11.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.17699814 11.47200012 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.50699997 11.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.00699997 11.47200012 Tm [(25)] TJ ET EMC /P <> BDC BT /FAAAGE 10 Tf 1 0 0 -1 65.00700378 11.47200012 Tm 2 Tr 0.2857143 w 0 G [<0003>] TJ ET EMC /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 75.07700348 11.47200012 Tm 0 Tr [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.07700348 11.47200012 Tm [(\(mPa)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.84600067 11.47200012 Tm [()] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.18099976 11.47200012 Tm [(s\))] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 113.40299988 11.47200012 Tm /GS29 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 -1 m 50.59999847 -1 l 50.59999847 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <> BDC BT 1 0 0 -1 8.14999962 12.08599949 Tm /GS30 gs 0 g [(33.14)] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.64999962 12.08599949 Tm /GS31 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 -1 m 58.95000076 -1 l 58.95000076 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <> BDC BT 1 0 0 -1 14.82499981 12.08599949 Tm /GS32 gs 0 g [(8.75)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.32500076 12.08599949 Tm /GS33 gs 0 g [( )] TJ ET EMC Q Q Q q 1 0 0 1 0 34.59999847 cm q -1 -1 m 128.55000305 -1 l 128.55000305 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 3.34699988 11.47200012 Tm /GS34 gs 0 g [(Viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.67699814 11.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.17699814 11.47200012 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.50699997 11.47200012 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.00699997 11.47200012 Tm [(40)] TJ ET EMC /P <> BDC BT /FAAAGE 10 Tf 1 0 0 -1 65.00700378 11.47200012 Tm 2 Tr 0.2857143 w 0 G [<0003>] TJ ET EMC /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 75.07700348 11.47200012 Tm 0 Tr [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.07700348 11.47200012 Tm [(\(mPa)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.84600067 11.47200012 Tm [()] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.18099976 11.47200012 Tm [(s\))] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 113.40299988 11.47200012 Tm /GS35 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 -1 m 50.59999847 -1 l 50.59999847 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <> BDC BT 1 0 0 -1 8.14999962 11.38599968 Tm /GS36 gs 0 g [(17.25)] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.64999962 11.38599968 Tm /GS37 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 -1 m 58.95000076 -1 l 58.95000076 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <> BDC BT 1 0 0 -1 14.82499981 11.38599968 Tm /GS38 gs 0 g [(5.70)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.32500076 11.38599968 Tm /GS39 gs 0 g [( )] TJ ET EMC Q Q Q q /GS40 gs 0 G 0 0.5 m 235.09999084 0.5 l S Q q /GS41 gs 0 G 0 17.10000038 m 235.09999084 17.10000038 l S Q q /GS42 gs 0 G 0 50.69999695 m 235.09999084 50.69999695 l S Q Q q 1 0 0 1 0 363.20001221 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 378.79998779 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS43 gs 0 g [(In)] TJ ET EMC /P <> BDC BT 1 0 0 -1 8.32999992 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 10.94200039 11.38599968 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 15.38000011 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 17.99200058 11.38599968 Tm [(volume)] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.98699951 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.59899902 11.38599968 Tm [(manufac)1(turing)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.91000366 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.52200317 11.38599968 Tm [(environme)1(nt,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.56399536 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.17599487 11.38599968 Tm [(concerni)1(ng)] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.6000061 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.21200562 11.38599968 Tm [(cost)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32000732 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 8.32999992 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 11.04500008 26.98600006 Tm [(consumption)] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.70999908 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 65.42500305 26.98600006 Tm [(\(CoC\),)] TJ ET EMC /P <> BDC BT 1 0 0 -1 92.92500305 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.63999939 26.98600006 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.41799927 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.13300323 26.98600006 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.80299377 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 145.51800537 26.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.95599365 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.67100525 26.98600006 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.23300171 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 200.94799805 26.98600006 Tm [(need)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.82499695 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.53999329 26.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31799316 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(be)] TJ ET EMC /P <> BDC BT 1 0 0 -1 9.43799973 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.25899982 42.58599854 Tm [(recla)1(imed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.6780014 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.49900055 42.58599854 Tm [(every)] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.70600128 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.52700043 42.58599854 Tm [(tim)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.30000305 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.1210022 42.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.55899811 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.37999725 42.58599854 Tm [(reused)] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.47900391 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.30000305 42.58599854 Tm [(within)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.85699463 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.67799377 42.58599854 Tm [(up)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.67799377 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.49899292 42.58599854 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.2769928 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.0980072 42.58599854 Tm [(72hours)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32000732 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 8.32999992 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.19799995 58.18599701 Tm [(their)] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.52300072 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.39099884 58.18599701 Tm [(lifet)1(ime.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.98999786 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.85800171 58.18599701 Tm [(To)] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.96600342 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.83399963 58.18599701 Tm [(control)] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.15899658 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.02700043 58.18599701 Tm [(lifet)1(ime)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.12600708 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.9940033 58.18599701 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.32400513 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 166.19200134 58.18599701 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.97000122 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.83799744 58.18599701 Tm [(chemi)1(cals,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31799316 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(two)] TJ ET EMC /P <> BDC BT 1 0 0 -1 15 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.11199951 73.78600311 Tm [(standards)] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.88100052 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 60.99300003 73.78600311 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.19999695 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.31199646 73.78600311 Tm [(proposed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.97200012 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.08399963 73.78600311 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.7440033 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.85600281 73.78600311 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.07299805 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.18499756 73.78600311 Tm [(machi)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.05700684 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.16900635 73.78600311 Tm [(itself.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.66400146 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.77600098 73.78600311 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32299805 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(first)] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.1079998 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.97800064 89.38600159 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.64800072 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.51799965 89.38600159 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.29600143 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.16600037 89.38600159 Tm [(strictl)1(y)] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.93900299 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.80899811 89.38600159 Tm [(control)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.13400269 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.0039978 89.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.22100067 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.09100342 89.38600159 Tm [(water)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.29800415 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.16799927 89.38600159 Tm [(concent)1(ration)] TJ ET EMC /P <> BDC BT 1 0 0 -1 202.58700562 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.45700073 89.38600159 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.23500061 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.10499573 89.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32200623 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(chemi)1(cals.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.47999954 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.13800049 104.98600006 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.68500137 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 65.34300232 104.98600006 Tm [(second)] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.11199951 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.76999664 104.98600006 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.44000244 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.09799957 104.98600006 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.87599945 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.53399658 104.98600006 Tm [(referenc)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.71699524 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.375 104.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.15299988 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.81100464 104.98600006 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.24899292 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.90699768 104.98600006 Tm [(high)] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.68499756 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 200.34300232 104.98600006 Tm [(recla)1(im)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32299805 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(rate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.98499966 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.19099998 120.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.52099991 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.72699928 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.94400024 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.15000153 120.58599854 Tm [(chemi)1(cals.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.62999725 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.83599854 120.58599854 Tm [(If)] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.4960022 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.70200348 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.91899872 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.125 120.58599854 Tm [(water)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.33200073 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.53799438 120.58599854 Tm [(content)] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.97200012 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.17799377 120.58599854 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.8480072 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.05400085 120.58599854 Tm [(too)] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.83200073 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.03799438 120.58599854 Tm [(high,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31599426 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(fluorides)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.54700089 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.27600098 136.18600464 Tm [(dissociati)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.0490036 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.77799988 136.18600464 Tm [(will)] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.33499908 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.06400299 136.18600464 Tm [(be)] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.5019989 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.23100281 136.18600464 Tm [(enhance)1(d,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.48500061 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.21400452 136.18600464 Tm [(leadi)1(ng)] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.647995 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.3769989 136.18600464 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.15499878 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 225.88400269 136.18600464 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32200623 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(sharp)] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.65999985 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.63800049 151.78599548 Tm [(increa)1(s)-1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.39199829 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 60.36999893 151.78599548 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.14800262 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.12599945 151.78599548 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.34300232 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.32099915 151.78599548 Tm [(etchi)1(ng)] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.75499725 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.73300171 151.78599548 Tm [(rate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.71800232 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.69599915 151.78599548 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 145.02600098 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.0039978 151.78599548 Tm [(copper)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.21099854 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.18899536 151.78599548 Tm [(meta)1(l,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 202.90100098 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.8789978 151.78599548 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31700134 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.38600159 Tm [(will)] TJ ET EMC /P <> BDC BT 1 0 0 -1 15.55700016 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 20.12400055 167.38600159 Tm [(cause)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.33100128 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.89799881 167.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.11500168 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.68199921 167.38600159 Tm [(excessive)] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.99700165 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.56400299 167.38600159 Tm [(loss)] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.12599945 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.69300079 167.38600159 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.022995 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.58999634 167.38600159 Tm [(copper.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.29699707 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.86399841 167.38600159 Tm [(If)] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.52400208 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.09100342 167.38600159 Tm [(there)] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.07600403 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.64300537 167.38600159 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 216.31300354 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.88000488 167.38600159 Tm [(an)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31799316 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(excessive)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.31499863 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.2840004 182.98600769 Tm [(loss)] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.84600067 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.81499863 182.98600769 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.14499664 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.11399841 182.98600769 Tm [(water,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.82099915 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.79000092 182.98600769 Tm [(react)1(ive)] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.43099976 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.3999939 182.98600769 Tm [(species)] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.2769928 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.2460022 182.98600769 Tm [(will)] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.80299377 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.77200317 182.98600769 Tm [(be)] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.21000671 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.17900085 182.98600769 Tm [(reduced,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32499695 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 198.58599854 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.43799973 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.44599915 198.58599854 Tm [(will)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.00299835 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.01100159 198.58599854 Tm [(have)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.88800049 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.89600372 198.58599854 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 72.33399963 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 75.34200287 198.58599854 Tm [(direct)] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.10600281 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.11399841 198.58599854 Tm [(negati)1(ve)] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.98599243 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.9940033 198.58599854 Tm [(impac)1(t)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.20599365 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.21400452 198.58599854 Tm [(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.21400452 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.22200012 198.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.43899536 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.44700623 198.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31900024 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 214.18600464 Tm [(effect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.64599991 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.44499969 214.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.88299942 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.68199921 214.18600464 Tm [(ma)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.89900208 214.18600464 Tm [(ke)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.33699799 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.13600159 214.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.35299683 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.15200043 214.18600464 Tm [(residue)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.02900696 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.82800293 214.18600464 Tm [(removal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.59199524 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.39100647 214.18600464 Tm [(incompl)1(ete.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32000732 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 229.78599548 Tm [(Neverthel)1(ess)-1(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.14599991 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.08000183 229.78599548 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.29699707 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.23100281 229.78599548 Tm [(etchi)1(ng)] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.66500092 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.59899902 229.78599548 Tm [(rate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.58399963 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All Rights Reserved. Times New RomanRegularMonotype:Times New Roman Regular (Microsoft)Version 6.96TimesNewRomanPSMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 2016 The Monotype Corporation. All Rights Reserved. Times New RomanRegularMonotype:Times New Roman Regular (Microsoft)Version 6.96TimesNewRomanPSMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.NormalobyejnnormalStandardMicrosoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited. The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions: The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software. THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. NormaaliNormlNormaleStandaardNormalny1KG=K9NormlneNavadnothngArrunta!dA T<*?A`?pEE2@+.2@()22'߲2޲BB2޲682޳*-2A (߳(.2A~@ڳ$&2dɲ2A d2Aso/O/oTkj"vutusA 0 0@ll2ml2}!#2}2A }}}}|!#2|2A-||||0s@sss ssssssssswj)j(@g9@2?f@f2f@f 2@f 2@f 2?e@e 2@e2@e 2kAc{cc$c4cDcc$/Nm@0D2P-<_<7Abbbpbb_ ^ _0_@^^__^_ 0P`p 0'0J' P 0P` 0@@,'))))@L<F%@<%@ :#r9<8I1$0%*$&#V5UU75u@,tbVQ;3-   @+JKKSBKKTB7+KR8+KP[XY8+TXCX/|YYKcKb S# QZ#Bv??>9FD>9FD>9FD>9FD>9F`D>9F`D++++++++++++++++++++++++BKSX5BY2KSX5BYKGS \XqoEDpoEDYXzqERXqzDYYKGS \X"pED<pEDYX"ERX"DYYKLS \XI"ED""EDYXIERXIDYYKgS \X$qEDPqEDYX$ERX$DYYKS \X"ED""EDYX ERX DYYKS \X%%ED,%EDYX7%ERX%7DYYKS \X%%ED#%EDYXY%ERX%YDYYKS \X%%ED(%EDYX%ERX%DYY+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++eB+++++++++++++++++++++++++++++++++++++++++++adcEe#E`#Ee`#E`vhb dEe#E &`bch &ae#eDd#D acEe#E &`bch &aec#eDa#DcETXc@eDa@aE#aDYCKEe#E`#Ee`#E`vhb CEe#E &`bch &ae#eDC#D KEe#E &`bch &aeK#eD#DKETXK@eD@E#aDYKRBKPXBYC\XBY CX`!YBp>CX;!~ +Y #B#BCX-A-A +Y#B#BCX~;! +Y#B#B+EiDEiDEiDEiDssstsssstuu+ssttuEiDsst+K!SKFQZX<> endobj 12 0 obj <>>> endobj 13 0 obj <> endobj 14 0 obj <>stream /CIDInit /ProcSet findresource begin 11 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 82 beginbfchar <0000> <0001><0041> <0002><0020> <0003><25CB> <0004><0054> <0005><0069> <0006><006E> <0007><0067> <0008><0059> <0009><0061> <000A><006F> <000B><0031> <000C><002C> <000D><0043> <000E><0068> <000F><0065> <0010><0057> <0011><006A> <0012><0075> <0013><0058> <0014><0079> <0015><005A> <0016><0046> <0017><0070> <0018><0044> <0019><0076> <001A><0064> <001B><0048> <001C><002E> <001D><0071> <001E><0032> <001F><0053> <0020><0052> <0021><0063> <0022><006B> <0023><004C> <0024><0062> <0025><0072> <0026><0074> <0027><0050> <0028><004D> <0029><0073> <002A><0028> <002B><0029> <002C><0049> <002D><006C> <002E><0045> <002F><002D> <0030><006D> <0031><003A> <0032><0040> <0033><0039> <0034><0030> <0035><0077> <0036><002F> <0037><0066> <0038><0078> <0039><007A> <003A><0042> <003B><004F> <003C><004E> <003D><0035> <003E><0038> <003F><0033> <0040><2019> <0041><005B> <0042><005D> <0043><0047> <0044><0055> <0045><0034> <0046><0056> <0047><0037> <0048><003B> <0049><0025> <004A><004B> <004B><0036> <004C><2103> <004D><2264> <004E><00C5> <004F><002B> <0050><004A> <0051><0026> endbfchar endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 15 0 obj <> endobj 16 0 obj <> endobj 17 0 obj <> endobj 18 0 obj <> endobj 19 0 obj <> endobj 20 0 obj <>stream POS/26`cmapT<cvt p5Xfpgm\W0glyfD)head'N~?6hheac?8$hmtx}?\locaz?maxp*_@p nameY!@1*postq prepg"q$+33*${ MS @&   @@ ().0123456789ABCDFGINSTefhirsu ().0123456789ABCDFGINSTefhirsuPjsbym    ?6PQZ[\]`abdhijklmnhin`gnfh_acdfhjklmnoportuvvprstuvopqrsuwwxyz{|}{|}wyz|xz|}x}~~~hicjopqopqrflmpy|tuvwz{|}~x{vyz|}~stuwz}A^^wHfTn \(h@Ztsrqponmlkjihgfedb_^]\[ZYXUTSRQPONMLKJIHGFEDCBA@?>=<;:98765/.-,(&%$#" ,E#F` &`&#HH-,E#F#a &a&#HH-,E#F` a F`&#HH-,E#F#a ` &a a&#HH-,E#F`@a f`&#HH-,E#F#a@` &a@a&#HH-, <<-, E# D# ZQX# D#Y QX# MD#Y &QX# D#Y!!-, EhD ` EFvhE`D-, C#Ce -, C#C -,(#p(>(#p(E:-, E%EadPQXED!!Y-, EC`D-,CCe -, i@a ,b`+ d#da\XaY-,E+)#D)z-,Ee,#DE+#D-,KRXED!!Y-,%# `#-,%# a#-,%-, ` <<-, a <<-,CC -,!! d#d@b-,!QX d#d b@/+Y`-,!QX d#dUb/+Y`-, d#d@b`#!-,E#E`#E`#E`#vhb -,&&%%E#E &`bch &ae#DD-, ETX@D E@aD!!Y-,E0/E#Ea``iD-,KQX/#p#B!!Y-,KQX %EiSXD!!Y!!Y-,EC`c`iD-,/ED-,E# E`D-,E#E`D-,K#QX34 34YDD-,CX&EXdf`d `f X!@YaY#XeY)#D#)!!!!!Y-,CX%Ed `f X!@Ya#XeY)#D%% XY%% F%#B<%% F%`#B< XY%%)%%)%% XY%%CH%%`CH!Y!!!!!!!-,CX%Ed `f X!@Ya#XeY)#D%% XY%% F%#B<%%%% F%`#B< XY%%)) EeD%%)%% XY%%CH%%%%`CH!Y!!!!!!!-,% F%#B%%EH!!!!-,% %%CH!!!-,E# E P X#e#Y#h @PX!@Y#XeY`D-,KS#KQZX E`D!!Y-,KTX E`D!!Y-,KS#KQZX8!!Y-,!KTX8!!Y-,CTXF+!!!!Y-,CTXG+!!!Y-,CTXH+!!!!Y-,CTXI+!!!Y-,# Pd%TX@%TXCYO+Y#b+#!#XeY-, !T`C-,F#F`#Fa#  Fab@@pE`h:-, #Id#SX<!Y-,KRX}zY-,KKTB-,B#Q@SZX TXC`BY$QX @TXC`B$TX C`BKKRXC`BY@TXC`BY@cTXC`BY@cTXC`BY&QX@cTX@C`BY@cTXC`BY(QX@cTXC`BYYYYYYYCTX@ @@ @ CTX@  CRX@ @CRX@ @CRX@ @@ YYY@U@cUZX  YYYBBBBB-,Eh#KQX# E d@PX|Yh`YD-,%%#>#> #eB #B#?#? #eB#B-, b`#b-,%XY%%% TX!Y!%\%ZX +Y %J%G%G`%Gca%UX%%IcY%XY%%I %\ %ZX +Y%Fca% UXc!Ya# UXc!YY+%\XiY% H#:&XY&X%/Y#2!!-,% %% %JSX% % %%Y%% %c#%c` @cSX!&& @ceQX&e&e &&%% .%% .%%YY UX%%%% % % & TX!Y%%% %I#%% % %Y QR#xa%%% %%Iab%% %#8%%%% % %İ%% % %I%T#y!!!!!!!!!!!!-,#TX@@YTX@@Y[+-,TX@@Y[+-,TX@@Y[+-,&&&&[+-,%c `f% b`#b-, EiD-,#JN+-,#JN+-,#J#Ed%d%adCRX! dYN+#PXeY-,#J#Ed%d%adCRX! dYN+#PXeY-, %JN+;-, %JN+;-,%%g+;-,%%h+;-,%F%F`%.%%& PX!jlY+%F%F`ab #:# #:-,%G%G`%Gca%%Ic#%Jc Xb!Y&F`FF` ca-,&%%&n+ #:# #:-,# TX!%N+P `Y `` QX!! 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R!!c+X@ !LMMM M@ Mt&@ !LMMM@ Lu& M!M`!Mش M M MMM-Q U??2/++++++10]++]]+++++]]++++++-lQ U??+201Y#"&&67!"&54>3!2 .$"&     J($ k 4Hư+XJ@M`J+u?f?C?4?$??C@  z5j5K5:5+55Cp MM0  @ M :00&YD_??9//+]++]]]]]]]9/]]]]]210]+@ 0:l00&lYDl_?+?+9/+01Y#".54>32#".#">324.#"32>4lqQ|\=%.Own%L@, &6M3]U)AMV1iY&6ZB%JE?!?^?@^>UyI(Jl^Sg<  L\9e`:_B$i-0QeR!'7G+X6L6 L5L5 L4L4 L3M3MIM`I0 L0L0 L0 M0@( L(L( L( M(@#MM 8 L8@M8L8 L8 M8CԳMMMMM MB@ LB0MBLB LB MBC@ @ M 5=-YE_??99/+++++++++++++++++99//++99++++++++10]+++++++++@5=-lYEl_?+?+9901Y#".54>7.54>324.#"664.'326BI,ajk.2C_<|( 6  "#Hrg0eDa4G [*Zmq%]!Q4mzkRRckR~`j H d\B.Nx !!" "#$\$l%'N)":/6$-"$,Pvh*   V *l$ ;  P +e 6    $,  P  vh *   V *   l$ 2016 Microsoft Corporation. All Rights Reserved.Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.CalibriRegularMicrosoft: CalibriVersion 6.18Calibri is a trademark of the Microsoft group of companies.Luc(as) de GrootCalibri is a modern sans serif family with subtle roundings on stems and corners. It features real italics, small caps, and multiple numeral sets. Its proportions allow high impact in tightly set lines of big and small text alike. Calibri's many curves and the new rasteriser team up in bigger sizes to reveal a warm and soft character.http://www.microsoft.com/typography/ctfontshttp://lucasfonts.comMicrosoft supplied font. You may use this font to create, display, and print content as permitted by the license terms or terms of use, of the Microsoft product, service, or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.http://www.microsoft.com/typography/fonts/default.aspx 2016 Microsoft Corporation. All Rights Reserved.Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.CalibriRegularMicrosoft: Calibri: 2005Version 6.18Calibri is a trademark of the Microsoft group of companies.Luc(as) de GrootCalibri is a modern sans serif family with subtle roundings on stems and corners. It features real italics, small caps, and multiple numeral sets. Its proportions allow high impact in tightly set lines of big and small text alike. Calibri's many curves and the new rasteriser team up in bigger sizes to reveal a warm and soft character.http://www.microsoft.com/typography/ctfontshttp://lucasfonts.comMicrosoft supplied font. You may use this font to create, display, and print content as permitted by the license terms or terms of use, of the Microsoft product, service, or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.http://www.microsoft.com/typography/fonts/default.aspx 2016 Microsoft Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Microsoft supplied font. You may use this font to create, display, and print content as permitted by the license terms or terms of use, of the Microsoft product, service, or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited. The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions: The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software. THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.  AS888U8U8U8U8U8U8U8U4T4Tdk Ddt  J  J  J  J  J  J ~ J } J | J { J z J y J x J w J v J u J t J s J q J p J o J n J m J l J k J j J i J h J g J f J e J d J c J b J a J ` J _ J ^ J ] J \ J [ J Z J Y J X J W J V J U J T J S J R J Q J P J O J N J M J L J K J J J I J H J G J F J E J D J C J B J A J @ J ? J > J = J < J ; J : J 9 J 8 J 7 J 6 J 5 J 4 J 3 J 2 J 1 J 0 J / J . J - J , J + J * J ) J ( J ' J & J % J $ J # J " J ! 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IN+Y;-,] %cV`+%%&m+]%`+%%%%o+]&cV`+ RXP+%%%%%q+8R%RZX%%I%%I` @RX!RX TX%%%%I8%%%%I8YYYYY!!!!!-,%PX@cT\KR[Y-B@ 1 .+<NCzV9l88<@: D~ d0 " 1 E`   (     D~     b8 0  *   (   (((  )(  $)*) -).        2015 The Monotype Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Arial is a trademark of The Monotype Corporation.Monotype:Arial Regular (Microsoft)Version 6.90ArialMT 2015 The Monotype Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Monotype Type Drawing Office - Robin Nicholas, Patricia Saunders 1982You may use this font as permitted by the EULA for the product in which this font is included to display and print content. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 2015 The Monotype Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Arial is a trademark of The Monotype Corporation.Monotype:Arial Regular (Microsoft)Version 6.90ArialMTMonotype Type Drawing Office - Robin Nicholas, Patricia Saunders 1982You may use this font as permitted by the EULA for the product in which this font is included to display and print content. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.NormalnyobyejnnormalStandardArial is a trademark of The Monotype Corporation.You may use this font as permitted by the EULA for the product in which this font is included to display and print content. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions: The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software. THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. 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All Rights Reserved.Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.CalibriBoldMicrosoft: Calibri BoldVersion 6.18Calibri-BoldCalibri is a trademark of the Microsoft group of companies.Luc(as) de GrootCalibri is a modern sans serif family with subtle roundings on stems and corners. It features real italics, small caps, and multiple numeral sets. Its proportions allow high impact in tightly set lines of big and small text alike. Calibri's many curves and the new rasteriser team up in bigger sizes to reveal a warm and soft character.http://www.microsoft.com/typography/ctfontshttp://lucasfonts.comMicrosoft supplied font. You may use this font to create, display, and print content as permitted by the license terms or terms of use, of the Microsoft product, service, or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.http://www.microsoft.com/typography/fonts/default.aspx 2016 Microsoft Corporation. All Rights Reserved.Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.CalibriBoldMicrosoft: Calibri BoldVersion 6.18Calibri-BoldCalibri is a trademark of the Microsoft group of companies.Luc(as) de GrootCalibri is a modern sans serif family with subtle roundings on stems and corners. It features real italics, small caps, and multiple numeral sets. Its proportions allow high impact in tightly set lines of big and small text alike. Calibri's many curves and the new rasteriser team up in bigger sizes to reveal a warm and soft character.http://www.microsoft.com/typography/ctfontshttp://lucasfonts.comMicrosoft supplied font. You may use this font to create, display, and print content as permitted by the license terms or terms of use, of the Microsoft product, service, or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.http://www.microsoft.com/typography/fonts/default.aspx 2016 Microsoft Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Microsoft supplied font. You may use this font to create, display, and print content as permitted by the license terms or terms of use, of the Microsoft product, service, or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited. The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions: The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software. THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.  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U       (  @  /   9 +5 35 @&'4 @(5  @9 @> s   s++<++N++]+++++qC\X@ @ ? @ ? @? @? @ ? @? ? &? (? ? '9 @ #? ? ? > #? @ -? @(? 9+++++++++++++++++++YM+<+?lۗ4/A&7I`.88B6 :eHLP  3!)2I@O\Y/'@ / "Jb>zD%`L' ?' ?@T>'$%%z ($8$i!"" "' " " 3 ((" ~"F@  ` p  F@  @9@:4O(  ( <J++<+N]++M+]+<+??<9.+}]]<10]]]+++!#"&5463232>77654&'J gT.12Ct|K4-9!& .cWA"1!@2?+++++Y+<+?<+?<<<<<.+}+z]/++z/8+910]++!#654'&##33!7327667#"#,o&-"k3@Q. N*/*QuX%LO>I%Z)&1%%Y >-?A99@9(-444s2 2 s++<++N]++++++++++++MN]+++M+<+9?<<l@hAnBD~EG~HK/</VXSll V,0v40 064jy+ ;; C LN.\. , ,  6,B l l   V ,  0 v4 0  n ' .' ' 4' ( 0((H((P(x.((.( , (.(),.): )h,)t).) ,  ),)$*$.*"**P*.*^- *-,* ' .'),.): ' .' ( 0( 2016 The Monotype Corporation. All Rights Reserved. Times New RomanItalicMonotype:Times New Roman Italic (Microsoft)Version 6.96TimesNewRomanPS-ItalicMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 2016 The Monotype Corporation. All Rights Reserved. Times New RomanItalicMonotype:Times New Roman Italic (Microsoft)Version 6.96TimesNewRomanPS-ItalicMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.cursivaTimes New Roman cursivakurzvaTimes New Roman kurzvakursivTimes New Roman kursivKursivTimes New Roman KursivTimes New Roman Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited. The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions: The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software. THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 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W  M  +3W%3w:   AHg7@SYYdQ]+)B;/]B//B]bMI//339///3333333333017#"'&'7#37##"'&&'567&'67#'367##"&54767337"6765'67#'34'37#&'#k Z [ ]7 "J>!' / C:    a  ''F<"E h Ea$?;  :         "$/+   + .. !%CC@ #66 -""*&AA//9/3339/339/39/333339/3201737#37#65#'665"'35"73535'37#375#65'667#"od # )&%#" $ !&HG0   P Z<<358' PPPGLLC  K,69&CKU;@PL)GK) 9&#9>44))9//9/339/3339/333330176537736653'#77#'667#"'77#&547667334&'737"''667#"'&&'c-  .)+ '    I G  Z & 4( d  D#K+98( )         &fE/_< BӇ $%           "       F`~ R h "LnD^8P4t2 !!#$&%`%1/&''-'' 4',@ Nl           X D RX> > 8 8NlX Copyright ZHONGYI Electronic Co. 2001SimSunRegularVersion 5.15Trademark of ZHONGYI Electronic Co., Beijing Copyright ZHONGYI Electronic Co. 2001SimSunRegularVersion 5.15Trademark of ZHONGYI Electronic Co., BeijingMicrosoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.http://www.microsoft.com/typography/fonts Copyright ZHONGYI Electronic Co. 2001 [WOSepcnu1SNN-fN-hu5[PO`obg/g PQlScO0[OS^8Beijing ZhongYi Electronics Co.http://www.zhongyicts.com.cn @\3[3@Z3Y2X1W1@V0U0+T/S- R.@Q.P,O,+N*+M*L)K(J(+I(H'@G'F&E%D$C$B#A#@#?"@>"="@> endobj 51 0 obj <>>> endobj 52 0 obj <> endobj 53 0 obj <>stream /CIDInit /ProcSet findresource begin 11 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 37 beginbfchar <0000> <0001><0041> <0002><0020> <0003><2103> <0004><59EC> <0005><5CF0> <0006><738B> <0007><82F1> <0008><94DC> <0009><4E92> <000A><8FDE> <000B><53CC> <000C><5927> <000D><9A6C> <000E><58EB> <000F><9769> <0010><7ED3> <0011><6784> <0012><523B> <0013><8680> <0014><6E05> <0015><6D17> <0016><5DE5> <0017><827A> <0018><4E2D> <0019><8150> <001A><5931> <001B><6548> <001C><673A> <001D><7406> <001E><53CA> <001F><89E3> <0020><51B3> <0021><65B9> <0022><6848> <0023><7814> <0024><7A76> endbfchar endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 54 0 obj <> endobj 55 0 obj <> endobj 56 0 obj <> endobj 57 0 obj <> endobj 58 0 obj <> endobj 59 0 obj <> endobj 60 0 obj <> endobj 61 0 obj <> endobj 62 0 obj <> endobj 63 0 obj <> endobj 64 0 obj <> endobj 65 0 obj <>>> endobj 66 0 obj <> endobj 67 0 obj <>stream /CIDInit /ProcSet findresource begin 11 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 37 beginbfchar <0000> <0001><0041> <0002><0020> <0003><2103> <0004><59EC> <0005><5CF0> <0006><738B> <0007><82F1> <0008><94DC> <0009><4E92> <000A><8FDE> <000B><53CC> <000C><5927> <000D><9A6C> <000E><58EB> <000F><9769> <0010><7ED3> <0011><6784> <0012><523B> <0013><8680> <0014><6E05> <0015><6D17> <0016><5DE5> <0017><827A> <0018><4E2D> 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125.02600098 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.41499329 42.58599854 Tm [(chemi)1(cal\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.83399963 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.2230072 42.58599854 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.00100708 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.38999939 42.58599854 Tm [(control)] TJ ET EMC /P <> BDC BT 1 0 0 -1 213.71499634 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.10400391 42.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32099915 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(concent)1(ration)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.41899872 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.94499969 58.18599701 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.27500153 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.8010025 58.18599701 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.01799774 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.54399872 58.18599701 Tm [(chemi)1(cals)] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.52400208 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.05000305 58.18599701 Tm [(cooperat)1(ively)] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.46899414 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.99499512 58.18599701 Tm [(or)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32499695 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(separate)1(ly.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.0320015 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.72200012 73.78600311 Tm [(Moreover,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 87.65100098 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.34100342 73.78600311 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.55799866 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.2480011 73.78600311 Tm [(tool)] TJ ET EMC /P <> BDC BT 1 0 0 -1 120.80500031 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.49500275 73.78600311 Tm [(has)] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.82499695 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.51499939 73.78600311 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.95300293 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.64300537 73.78600311 Tm [(99.17%)] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.4730072 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.16299438 73.78600311 Tm [(recla)1(im)] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.14300537 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.83299255 73.78600311 Tm [(rate,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31799316 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.43799973 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.93799973 89.38600159 Tm [(30L)] TJ ET EMC /P <> BDC BT 1 0 0 -1 33.04600143 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.54600143 89.38600159 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.87599945 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.37599945 89.38600159 Tm [(liqui)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.71099854 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 72.21099854 89.38600159 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.8809967 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.3809967 89.38600159 Tm [(enough)] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.81900024 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.31900024 89.38600159 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.09700012 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.59700012 89.38600159 Tm [(meet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.03100586 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 145.53100586 89.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.7480011 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.2480011 89.38600159 Tm [(3-day)] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.01699829 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.51699829 89.38600159 Tm [(demand.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.67199707 89.38600159 Tm /GS44 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 93.59999847 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 109.19999695 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS45 gs 0 g [(Withi)1(n)] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.77300072 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.27300072 11.38599968 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.49000168 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.99000168 11.38599968 Tm [(experim)1(ent,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 92.47000122 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.97000122 11.38599968 Tm [(several)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.28500366 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.78500366 11.38599968 Tm [(importa)1(nt)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.66700745 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.16700745 11.38599968 Tm [(parame)1(ters)] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.02900696 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 213.52900696 11.38599968 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 225.73599243 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(firstly)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.88699913 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.38699913 26.98600006 Tm [(designed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.93399811 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.43399811 26.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 72.21199799 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.71199799 26.98600006 Tm [(test,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.09899902 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.59899902 26.98600006 Tm [(such)] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.92900085 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.42900085 26.98600006 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.75900269 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.25900269 26.98600006 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.23899841 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.73899841 26.98600006 Tm [(additi)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.51199341 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.01199341 26.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 207.44999695 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(removal)1(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.26399994 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.76399994 42.58599854 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.41899872 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.91899872 42.58599854 Tm [(rate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.90399933 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.40399933 42.58599854 Tm [(checks)] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.61100006 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.11100006 42.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.5490036 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.0490036 42.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.26600647 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.76600647 42.58599854 Tm [(control)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.09100342 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 166.59100342 42.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.92100525 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.42100525 42.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.63800049 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.13800049 42.58599854 Tm [(effect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.78399658 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.28399658 42.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 229.61399841 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(water)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.20700073 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.70700073 58.18599701 Tm [(concent)1(ration.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.62599945 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.12599945 58.18599701 Tm [(Secondly,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.84300232 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.34300232 58.18599701 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.65800476 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.15800476 58.18599701 Tm [(running)] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.26600647 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.76600647 58.18599701 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.98300171 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.48300171 58.18599701 Tm [(KLA)] TJ ET EMC /P <> BDC BT 1 0 0 -1 216.03500366 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(inli)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.77300072 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.27300072 73.78600311 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.6969986 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.1969986 73.78600311 Tm [(check)] TJ ET EMC /P <> BDC BT 1 0 0 -1 75.51200104 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.01200104 73.78600311 Tm [(\(patte)1(rn)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.10600281 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.60600281 73.78600311 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.36500549 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.86500549 73.78600311 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.64300537 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.14300537 73.78600311 Tm [(single)] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.02999878 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.52999878 73.78600311 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 227.39199829 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(structure\),)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.81499863 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.31499863 89.38600159 Tm [(special)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.07900238 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.57900238 89.38600159 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.55899811 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.05899811 89.38600159 Tm [(maps)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.16699982 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.66700745 89.38600159 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.44500732 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.94500732 89.38600159 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.38299561 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 166.88299561 89.38600159 Tm [(partic)1(les)] TJ ET EMC /P <> BDC BT 1 0 0 -1 200.75500488 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.25500488 89.38600159 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 215.46200562 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(concent)1(rated)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.07899857 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.57899857 104.98600006 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.35699844 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.85699844 104.98600006 Tm [(cente)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.28099823 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.78099823 104.98600006 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.11100006 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.61100006 104.98600006 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.37000275 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.87000275 104.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.30799866 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.80799866 104.98600006 Tm [(looked)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.0249939 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.5249939 104.98600006 Tm [(like)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.52000427 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.02000427 104.98600006 Tm [(ball-)] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(shape)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.7689991 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.2689991 120.58599854 Tm [(under)] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.0379982 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.5379982 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.75500107 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 65.25499725 120.58599854 Tm [(SEM)] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.81700134 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.31700134 120.58599854 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.63200378 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.13200378 120.58599854 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.80200195 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.30200195 120.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.17399597 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.67399597 120.58599854 Tm [(were)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.10299683 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.60299683 120.58599854 Tm [(found.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.43299866 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(Through)] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.43799973 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.93799973 136.18600464 Tm [(continua)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.15000153 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.65000153 136.18600464 Tm [(speculat)1(ion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.19200134 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.69200134 136.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.13000488 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.63000488 136.18600464 Tm [(improvem)1(ent,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 197.44999695 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 199.94999695 136.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.16700745 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.66700745 136.18600464 Tm [(ball)] TJ ET EMC /P <> BDC BT 1 0 0 -1 229.66200256 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.42399979 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.92399979 151.78599548 Tm [(issue)] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.92399979 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.42399979 151.78599548 Tm [(was)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.97599792 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.47599792 151.78599548 Tm [(successfully)] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.35299683 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.85299683 151.78599548 Tm [(resolved)] TJ ET EMC /P <> BDC BT 1 0 0 -1 152.72999573 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.22999573 151.78599548 Tm [(by)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.22999573 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.72999573 151.78599548 Tm [(using)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.3999939 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.8999939 151.78599548 Tm [(low-)] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.38600159 Tm [(viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.55699921 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.05699921 167.38600159 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.6190033 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.1190033 167.38600159 Tm [(or)] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.4489975 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.9489975 167.38600159 Tm [(by)] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.9489975 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.4489975 167.38600159 Tm [(process)] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.43899536 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.93899536 167.38600159 Tm [(tuning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.4960022 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.9960022 167.38600159 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.77400208 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.27400208 167.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.49099731 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.99099731 167.38600159 Tm [(www.6163.com)] TJ ET EMC /P <> BDC BT 1 0 0 -1 207.77400208 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(single-wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.97600174 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.47600174 182.98600769 Tm [(tool.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 70.53299713 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.03299713 182.98600769 Tm [(Meanwhile,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 120.51799774 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.01799774 182.98600769 Tm [(from)] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.45599365 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.95599365 182.98600769 Tm [(experim)1(ental)] TJ ET EMC /P <> BDC BT 1 0 0 -1 197.15299988 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 199.65299988 182.98600769 Tm [(results,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 228.26100159 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 198.58599854 Tm [(some)] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.1079998 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.6079998 198.58599854 Tm [(BEOL)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.7159996 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.2159996 198.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.08799744 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.58799744 198.58599854 Tm [(common)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.58300018 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.08300018 198.58599854 Tm [(issues,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 152.4750061 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.9750061 198.58599854 Tm [(includi)1(ng)] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.7480011 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.2480011 198.58599854 Tm [(photo-)] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 214.18600464 Tm [(assistant)] TJ ET EMC /P <> BDC BT 1 0 0 -1 33.88700104 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.38700104 214.18600464 Tm [(copper)] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.59400177 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.09400177 214.18600464 Tm [(corrosion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.86299896 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.36299896 214.18600464 Tm [(failure)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.3480072 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.8480072 214.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.28599548 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.78599548 214.18600464 Tm [(residue)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.66299438 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.16299438 214.18600464 Tm [(remai)1(ning)] TJ ET EMC /P <> BDC BT 1 0 0 -1 227.70500183 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 229.78599548 Tm [(problems)] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.21699905 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.71699905 229.78599548 Tm [(can)] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.59400177 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.09400177 229.78599548 Tm [(be)] TJ ET EMC /P <> BDC BT 1 0 0 -1 65.53199768 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.03199768 229.78599548 Tm [(avoided)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.68699646 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.18699646 229.78599548 Tm [(effect)1(ively)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.93600464 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.43600464 229.78599548 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.21400452 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.71400452 229.78599548 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.93099976 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.43099976 229.78599548 Tm [(tool.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.48800659 229.78599548 Tm /GS46 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 343.20001221 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 358.79998779 cm /P <> BDC BT /FAAAAH 11 Tf 1 0 0 -1 0 11.74499989 Tm /GS47 gs 0 g [(2.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 8.25 11.74499989 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 11 11.74499989 Tm [(Experimental)] TJ ET EMC /P <> BDC BT 1 0 0 -1 75.15799713 11.74499989 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.90799713 11.74499989 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.64299774 11.74499989 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.39299774 11.74499989 Tm [(Discussion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.90899658 11.74499989 Tm /GS48 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 374.3999939 cm /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS49 gs 0 g [(2.1)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.5 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 15 11.38599968 Tm [(Particl)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.2120018 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.7120018 11.38599968 Tm [(additi)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.04699707 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.54699707 11.38599968 Tm [(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.54699707 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.04699707 11.38599968 Tm [(blanket)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.48100281 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.98100281 11.38599968 Tm [(wafer)] TJ ET EMC /P <> BDC BT /FAAAJF 10 Tf 1 0 0 -1 152.75900269 11.38599968 Tm /GS50 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 390 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS51 gs 0 g [(Particl)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.54199982 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 33.85800171 11.38599968 Tm [(additi)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.6309967 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.9469986 11.38599968 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.61699677 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.93299866 11.38599968 Tm [(defined)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.91799927 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.23400116 11.38599968 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.56400299 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.87999725 11.38599968 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.09700012 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.41299438 11.38599968 Tm [(delta)] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.84700012 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 163.16299438 11.38599968 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.49299622 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.80900574 11.38599968 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.78900146 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.10499573 11.38599968 Tm [(count)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32200623 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(before)] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.53700066 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.76300049 26.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.20100021 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.42699814 26.98600006 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.74199677 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.96800232 26.98600006 Tm [(wet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.40599823 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.63200378 26.98600006 Tm [(clea)1(n.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.22599792 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.45200348 26.98600006 Tm [(Particl)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.9940033 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.22000122 26.98600006 Tm [(additi)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.99299622 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.21899414 26.98600006 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.88900757 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.11500549 26.98600006 Tm [(crucia)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.31700134 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.54299927 26.98600006 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32099915 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(meta)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.21199989 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.10199928 42.58599854 Tm [(interc)1(onnection,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 92.7990036 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.68900299 42.58599854 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.01899719 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.90899658 42.58599854 Tm [(partic)1(les)] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.78100586 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 152.67100525 42.58599854 Tm [(may)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.88800049 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.77799988 42.58599854 Tm [(lead)] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.43299866 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.32299805 42.58599854 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.10099792 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.99099731 42.58599854 Tm [(poor)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32099915 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(elec)1(trical)] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.63600159 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.99200058 58.18599701 Tm [(property,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.3690033 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.72499847 58.18599701 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.16300201 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.51899719 58.18599701 Tm [(therefore)] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.60299683 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.95899963 58.18599701 Tm [(affect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.60499573 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.96099854 58.18599701 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.17799377 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.53399658 58.18599701 Tm [(yield)] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.52900696 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 215.88499451 58.18599701 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32299805 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(performanc)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.52199936 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.8730011 73.78600311 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.20300293 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 75.55400085 73.78600311 Tm [(device)1(s)-1(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.03900146 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.38999939 73.78600311 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.05999756 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.41099548 73.78600311 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.84899902 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.19999695 73.78600311 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.76199341 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.11300659 73.78600311 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32000732 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(indivi)1(dually)] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.33000183 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.54100037 89.38600159 Tm [(tested)] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.86599731 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.07700348 89.38600159 Tm [(using)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.74700165 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.95800018 89.38600159 Tm [(16)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.95800018 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.16899872 89.38600159 Tm [(piece)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.15400696 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.36500549 89.38600159 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.69500732 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.90600586 89.38600159 Tm [(300mm)] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.46299744 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.67399597 89.38600159 Tm [(wafers)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32400513 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(coate)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.09399986 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.68799973 104.98600006 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.4659996 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.06000137 104.98600006 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.4980011 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.09199905 104.98600006 Tm [(thin)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.64900208 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.24299622 104.98600006 Tm [(layer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.22799683 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.8219986 104.98600006 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.15200043 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.7460022 104.98600006 Tm [(PECVD)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.52900696 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.1230011 104.98600006 Tm [(oxide)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.33999634 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.93400574 104.98600006 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.71200562 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.30599976 104.98600006 Tm [(two)] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.30599976 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.8999939 104.98600006 Tm [(different)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32400513 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(chambe)1(rs)-1(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.81499863 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.13299942 120.58599854 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.68000031 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.9980011 120.58599854 Tm [(tempe)1(ratures)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.63899994 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.95700073 120.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.28700256 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.60499573 120.58599854 Tm [(chemi)1(cals)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.58500671 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.90299988 120.58599854 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.11000061 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABB 10 Tf 1 0 0 -1 188.42799377 120.58599854 Tm [<00450034004C001C>] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 211.16700745 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.48500061 120.58599854 Tm [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32499695 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(1)] TJ ET EMC /P <> BDC BT 1 0 0 -1 5 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 10.59599972 136.18600464 Tm [(shows)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.60100174 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.1969986 136.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.41400146 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.00999832 136.18600464 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.98999786 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.58599854 136.18600464 Tm [(additi)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.35900116 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 132.95500183 136.18600464 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.17199707 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 145.76800537 136.18600464 Tm [(80nm)] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.54600525 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.14199829 136.18600464 Tm [(size)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.68899536 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.28500366 136.18600464 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.94500732 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.54100037 136.18600464 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31900024 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.67000008 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.8029995 151.78599548 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.24100113 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.37400055 151.78599548 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.93599701 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.06900024 151.78599548 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.84700012 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.98000336 151.78599548 Tm [(16)] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.98000336 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 120.11299896 151.78599548 Tm [(consecuti)1(ve)] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.31500244 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.44799805 151.78599548 Tm [(runs.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.16999817 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.30299377 151.78599548 Tm [(From)] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.9730072 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.10600281 151.78599548 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32299805 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.38600159 Tm [(results,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.6079998 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.54599953 167.38600159 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.52600098 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABB 10 Tf 1 0 0 -1 64.46399689 167.38600159 Tm [<002A004D003E003400060030002B>] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 99.39099884 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.32900238 167.38600159 Tm [(adding)] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.54600525 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 132.48399353 167.38600159 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.14399719 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.08200073 167.38600159 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.86000061 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.79800415 167.38600159 Tm [(chemi)1(cals)] TJ ET EMC /P <> BDC BT 1 0 0 -1 207.77799988 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.71600342 167.38600159 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 217.38600159 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.32400513 167.38600159 Tm [(all)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31900024 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(well)] TJ ET EMC /P <> BDC BT 1 0 0 -1 17.21699905 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.71699905 182.98600769 Tm [(controll)1(ed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 60.25899887 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.75899887 182.98600769 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.1969986 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.6969986 182.98600769 Tm [(less)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.6969986 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.1969986 182.98600769 Tm [(than)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.41400146 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.91400146 182.98600769 Tm [(10ea)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.79100037 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.29100037 182.98600769 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 156.60600281 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.10600281 182.98600769 Tm [(clea)1(ning.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 195.47799683 182.98600769 Tm /GS52 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 251.57499695 0 cm /P <> BDC q 1 0 0 1 0 0.80000305 cm q 251 0 0 -169.05000305 0 169.05000305 cm /GS53 gs /X1 Do Q Q EMC /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 252 170.80000305 Tm [( )] TJ ET EMC q 1 0 0 1 0 171.6000061 cm /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 0 11.38599968 Tm /GS54 gs 0 g [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.25599957 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.50600052 11.38599968 Tm [(1.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.25600052 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.50600052 11.38599968 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.4980011 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.7480011 11.38599968 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.73000336 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 70.98000336 11.38599968 Tm [(adding)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.47499847 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.72499847 11.38599968 Tm [(situati)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.72399902 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.97399902 11.38599968 Tm [(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.97399902 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 142.22399902 11.38599968 Tm [(PECVD)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.00700378 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.50700378 11.38599968 Tm [(oxide)] TJ ET EMC /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 199.72399902 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.97399902 11.38599968 Tm [(blanket)] TJ ET EMC /P <> BDC BT 1 0 0 -1 228.46400452 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.62700081 Tm [(wafers)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.98500061 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.23500061 26.62700081 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.71900177 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.96900177 26.62700081 Tm [(using)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.47200012 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.72200012 26.62700081 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.72699738 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.97699738 26.62700081 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.97200012 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.22200012 26.62700081 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.2250061 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.4750061 26.62700081 Tm [(treat)1(ment.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.70799255 26.62700081 Tm /GS55 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 202.80000305 cm /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 0 11.02700043 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 218.3999939 cm /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS56 gs 0 g [(2.2)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.5 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 15 11.38599968 Tm [(Particl)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.2120018 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.7120018 11.38599968 Tm [(removal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.48100281 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.98100281 11.38599968 Tm [(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.98100281 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.48100281 11.38599968 Tm [(single-damascene)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.1269989 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.6269989 11.38599968 Tm [(structure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 207.73500061 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.77799988 26.98600006 Tm /GS57 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 249.6000061 cm /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS58 gs 0 g [(Dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.43799973 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.93799973 11.38599968 Tm [(fluid)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.82500076 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.32500076 11.38599968 Tm [(spray)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.98500061 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.48500061 11.38599968 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.15499878 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.65499878 11.38599968 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.09300232 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.59300232 11.38599968 Tm [(technol)1(ogy)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.0269928 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.5269928 11.38599968 Tm [(that)] TJ ET EMC /P <> BDC BT 1 0 0 -1 145.52200317 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.02200317 11.38599968 Tm [(uses)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.2440033 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.7440033 11.38599968 Tm [(high)] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.52200317 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.02200317 11.38599968 Tm [(pressure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.34199524 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(gas)] TJ ET EMC /P <> BDC BT 1 0 0 -1 13.32999992 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 15.82999992 26.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.6079998 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.1079998 26.98600006 Tm [(drive)] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.65499878 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.15499878 26.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.37200165 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.87200165 26.98600006 Tm [(liqui)1(ds)-1(,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.59899902 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.09899902 26.98600006 Tm [(forming)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.31599426 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.81599426 26.98600006 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.2539978 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.7539978 26.98600006 Tm [(mist)] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.98100281 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.48100281 26.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.91900635 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.41900635 26.98600006 Tm [(high-speed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.29600525 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(injec)1(tion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.99000168 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.49000168 42.58599854 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.26800156 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.76800156 42.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.98500061 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.48500061 42.58599854 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.2440033 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 87.7440033 42.58599854 Tm [(surface,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.11100006 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.61100006 42.58599854 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.04899597 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.54899597 42.58599854 Tm [(combine)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 186.87399292 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.37399292 42.58599854 Tm [(physical)] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.69900513 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(force)] TJ ET EMC /P <> BDC BT 1 0 0 -1 20.53700066 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.03700066 58.18599701 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.81499863 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.31499863 58.18599701 Tm [(chemi)1(cal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.40399933 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.90399933 58.18599701 Tm [(react)1(ion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.10600281 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.60600281 58.18599701 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.38400269 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.88400269 58.18599701 Tm [(assist)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.55400085 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.05400085 58.18599701 Tm [(nano-size)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.3690033 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.8690033 58.18599701 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.84899902 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(removal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.76399994 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.26399994 73.78600311 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.70199966 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.20199966 73.78600311 Tm [(post)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.87200165 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.37200165 73.78600311 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.02700043 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.52700043 73.78600311 Tm [(polymer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.85199738 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.35199738 73.78600311 Tm [(removal)1(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.61599731 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.11599731 73.78600311 Tm [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.95599365 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.45599365 73.78600311 Tm [(2)] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.45599365 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.95599365 73.78600311 Tm [(\(a\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.05499268 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.55499268 73.78600311 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 217.99299622 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(\(b\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 11.65999985 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.15999985 89.38600159 Tm [(compare)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.47499847 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.97499847 89.38600159 Tm [(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.97499847 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.47499847 89.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.69200134 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.19200134 89.38600159 Tm [(same)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.73899841 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.23899841 89.38600159 Tm [(batch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.89399719 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.39399719 89.38600159 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.72399902 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.22399902 89.38600159 Tm [(single-dam)1(ascene)] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.30299377 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(structure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.98500061 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.48500061 104.98600006 Tm [(wafer,)] TJ ET EMC /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 62.74399948 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 65.2440033 104.98600006 Tm [(whether)] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.4509964 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.9509964 104.98600006 Tm [(or)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.28099823 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.78099823 104.98600006 Tm [(not)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.55899811 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.05899811 104.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.83700562 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.33700562 104.98600006 Tm [(use)] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.66700745 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 152.16700745 104.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.38400269 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 166.88400269 104.98600006 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.10099792 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 186.60099792 104.98600006 Tm [(fluid)] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.48800659 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(spray,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.15999985 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.65999985 120.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.09799957 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.59799957 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.81499863 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.31499863 120.58599854 Tm [(results)] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.42299652 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.92299652 120.58599854 Tm [(show)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.03600311 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.53600311 120.58599854 Tm [(that)] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.53099823 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.03100586 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.2480011 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.7480011 120.58599854 Tm [(joini)1(ng)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.08299255 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.58299255 120.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.91299438 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.41299438 120.58599854 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.63000488 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.13000488 120.58599854 Tm [(fluid)] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.01699829 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(spray)] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.65999985 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.15999985 136.18600464 Tm [(has)] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.49000168 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.99000168 136.18600464 Tm [(made)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.64500046 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.14499664 136.18600464 Tm [(obvious)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.81500244 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.31500244 136.18600464 Tm [(improvem)1(ents)] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.5269928 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.0269928 136.18600464 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.80499268 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.30499268 136.18600464 Tm [(removing)] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.63000488 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.13000488 136.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.34700012 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(residues)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.76900101 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.26900101 151.78599548 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.70700073 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.20700073 151.78599548 Tm [(partic)1(les.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.57900238 151.78599548 Tm /GS59 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 405.6000061 cm /P <> BDC BT /FAAACB 10.5 Tf 1 0 0 -1 0 11.38799953 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 421.20001221 cm /P <> BDC q 1 0 0 1 0 1.80000305 cm q 251 0 0 -167.1000061 0 167.1000061 cm /GS60 gs /X2 Do Q Q EMC /P <> BDC BT /FAAACB 10.5 Tf 1 0 0 -1 252 169.80000305 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 592.79998779 cm /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 0 11.38599968 Tm /GS61 gs 0 g [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.25599957 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.50600052 11.38599968 Tm [(2.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.25600052 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.50600052 11.38599968 Tm [(\(a\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.49499893 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.74499893 11.38599968 Tm [(Particl)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 65.23300171 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.48300171 11.38599968 Tm [(count)] TJ ET EMC /P <> BDC BT 1 0 0 -1 87.47799683 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.72799683 11.38599968 Tm [(without)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.22899628 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.47899628 11.38599968 Tm [(using)] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.98199463 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 141.23199463 11.38599968 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.44900513 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.94900513 11.38599968 Tm [(fluid)] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.83599854 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.33599854 11.38599968 Tm [(spray)] TJ ET EMC /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 203.9960022 11.38599968 Tm [(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.2460022 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.4960022 11.38599968 Tm [(\(b\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.99000549 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(Particl)1(e)] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.48800087 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.73800087 26.98600006 Tm [(count)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.73300171 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.98300171 26.98600006 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.46700287 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 70.71700287 26.98600006 Tm [(adding)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.21199799 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.46199799 26.98600006 Tm [(15s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.96399689 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 112.21399689 26.98600006 Tm [(dual)] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.43099976 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.93099976 26.98600006 Tm [(fluid)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.81799316 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.31799316 26.98600006 Tm [(spray)] TJ ET EMC /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 174.97799683 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.22799683 26.98600006 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.22799683 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 186.47799683 26.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 197.4730072 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 199.7230072 26.98600006 Tm [(same)] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.21499634 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(process)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.99099922 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.24099922 42.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.23600006 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.48600006 42.58599854 Tm [(same)] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.97800064 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT /FAAABG 10 Tf 1 0 0 -1 65.22799683 42.58599854 Tm [(batch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.88300323 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.38300323 42.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.71299744 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.21299744 42.58599854 Tm [(single-dam)1(ascene)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.29200745 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.79200745 42.58599854 Tm [(structure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.7769928 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(wafer)] TJ ET EMC /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 22.75900078 58.18599701 Tm [(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.00900078 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.25900078 58.18599701 Tm /GS62 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 655.20001221 cm /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 670.79998779 cm /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 686.40002441 cm /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS63 gs 0 g [(2.3)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.5 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 15 11.38599968 Tm [(Etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 33.32500076 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.82500076 11.38599968 Tm [(rate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.93299866 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.43299866 11.38599968 Tm [(check)] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.18699646 11.38599968 Tm /GS64 gs 0 g [( )] TJ ET EMC Q Q Q 1 0 0 -1 0 841.90002441 cm endstream endobj 86 0 obj <>/A<>/StructParent 3>> endobj 87 0 obj <>/A<>/StructParent 4>> endobj 88 0 obj <> endobj 89 0 obj <> endobj 90 0 obj <> endobj 91 0 obj <> endobj 92 0 obj <> endobj 93 0 obj <> endobj 94 0 obj <>stream POS/22`cmapu;<4cvt ;pfpgmJ_dH 4glyfB0Lheadl 6hheaVmX$hmtx| locamaxpU name<:1postCD prep5Cd 2L3,%3Lf @x[TMC ! kF3!@L  ( A ALLJk#j% _U2tUK? &TP#5IIX.;#?9:N?= qL:mQ((Pd[|-tFNr 8Km<\iz"+R0G,;;>Kk!CAK_ g%1]n Pt{ 6HL\o67E?:;[',4GI]t2>\mp)zr%>YmqrP~{ 9FLMZhlr&?j^x$AUXq,^|+m3J$<MV\gw  '559?IM=PXmo*a3@y{a`/G1?Lktx| ;>EIM[do"6;>A`v'+s22Ia'Hb*#Dg$A\a#+0>FKR^^nz{ &''.678;>@[jpty)00CFiz:E&&nKv;[$P'&z%zQa;;x ;$$a^qDI%AEIDD0]#n5[%b4 \  S 2 wzN&[&b1O'$gu&&AEtzP+h1:%!sB$5rCJN*_fX] ZY]Ds."9#;@S}|Gdg+p62h UoI1yBa*wL^#]K rY(5=Vz jt[6P@:HH +W"X@BUT@?>=<;:987543210/.-,+*)('&%$#"!  ,E#F` &`&#HH-,E#F#a &a&#HH-,E#F` a F`&#HH-,E#F#a ` &a a&#HH-,E#F`@a f`&#HH-,E#F#a@` &a@a&#HH-, <<-, E# D# ZQX# D#Y QX# MD#Y QX# D#Y!!-, EhD ` EFvhE`D-, C#Ce -, C#C -,#p>#pE:-,E#DE#D-, E%EadPQXED!!Y-,Cc#b#B+-, EC`D-,CCe -, i@a ,b`+ d#da\XaY-,E+#Dz-,E+#D-,CXE+#DzEi #D QX+#Dz!zYY-,-,%F`F@aH-,/-, %E#DE#DEe#E %`j #B#hj`a Ry!@E TX#!?#YaDRy@ E TX#!?#YaD-,C#C -,C#C -, C#C -, C#Ce -,C#Ce -,C#Ce -,KRXED!!Y-, %#I@` c RX#%8#%e8c8!!!!!Y-,KdQXEi C`:!!Y-,%# `#-,%# a#-,%-, ` <<-, a <<-,++**-,CC -,>**-,5-,v#p E PXaY:/-,!! d#d@b-,!QX d#d b@/+Y`-,!QX d#dUb/+Y`-, d#d@b`#!-,&&&&Eh:-,&&&&Ehe:-,KS#KQZX E`D!!Y-,KTX E`D!!Y-,KS#KQZX8!!Y-,KTX8!!Y-,CXY-,CXY-,KTC\ZX8!!Y-,C\X %% d#dadQX%% F`H F`HY !!!!Y-,C\X %% d#dadQX%% F`H F`HY !!!!Y-,KS#KQZX:+!!Y-,KS#KQZX;+!!Y-,KS#KQZC\ZX8!!Y-, KT&KTZ C\ZX8!!Y-,F#F`F# F`ab# #pE` PXaFY`h:-,B#Q@SZX TXC`BY$QX @TXC`B$TX C`BKKRXC`BY@TXC`BY@cTXC`BY@cTXC`BY&QX@cTX@C`BY@cTXC`BY(QX@cTXC`BYYYYYYY-,CTXKS#KQZX8!!Y!!!!Y-Mr D  ++<\T` 3;k 6*8i--7@ W. hs%)%% (}{WD>%%YnFl_<k?V 5B !EW F 59Vv</V Sll`68vP0 L6P 0 ;W C3vx>:(4<p6: l l  ` 6  8 vP 0   (& >(D $( D( ( :))>:)X")B))6* *B<*^$*D*+>+ "+^B++:+,4,*,^8,v$,$<,*-*8---V-6-l (& >(D+>+  (& >(D ( :) 2016 The Monotype Corporation. All Rights Reserved. Times New RomanBold ItalicMonotype:Times New Roman Bold Italic (Microsoft)Version 6.96TimesNewRomanPS-BoldItalicMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 2016 The Monotype Corporation. All Rights Reserved. Times New RomanBold ItalicMonotype:Times New Roman Bold Italic (Microsoft)Version 6.96TimesNewRomanPS-BoldItalicMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.Negreta cursivaTimes New Roman Negreta cursivatun kurzvaTimes New Roman tun kurzvafed kursivTimes New Roman fed kursivFett KursivTimes New Roman Fett Kursiv Times New Roman  Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited. The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions: The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software. THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 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I,5鮠PNyr!ψ,Z.6aY\˵w@|¿ G׶W\8ecɩh&t+]nBKJvQ@Q@Q@Q@Q@Q@~C:nX5_?PNyrKUy+[h?+"~QB>_o?7QGa>F ?Yl?(!G/k7GE(fh|߶Co5}+"~QB>_o?7QGa>F ?Yl?Ct~lO|.?NO~ve_>gx+[Z鲟JTztvmiWE(fh|߶C~Q_?o5}"~;|rʾ<@~ͺ') `ރA.q/ᗃ4~_^u/7,|%xJW<5ÐxG/xcπ<5os{|/hZqyjQiP}VկoumVϨꗷW2%QB>_o7QGa>/c_ =_ _Vo|5Ii|/?Nk_tךOQZL+~|߶C~Q_?o5}"~E~QB>_o7QGa>F ?Yl??(!G/k7@WE(fh|߶C~Q_?o5}"~E~QB>_o7QGa>F ?Yl??(!G/k7@WE(fh|߶C~Q_?o5}"~E~QB>_o7QGa>F ?Yl??(!G/k7@WE(fh|߶C~Q_?o5}"~E~QB>_o7QGa>~?gg["~'b$4~g+_ykQ11xßQ%hKZzou;[;p|߶Co5}+"~QB>_o?7QGa>F ?Yl?(!G/k7GE(fh|߶Co5}+"~QB>_o?7QGa>F ?Yl?(!G/k7GE(fh|߶Co5}+"~QB>_o?7QGa>F ?Yl?(!G/k7GE(fh|߶Co5}+"~QB>_o? )u._Ǟ "~? &) <_[/_[%c???W?kilh((((((((((((((((((((((((((((((((((((((((+>"~˟~+v?i{o wƿxK[):wU W='+]~O9-QE endstream endobj 110 0 obj <> endobj 111 0 obj <> endobj 112 0 obj <> endobj 113 0 obj <> endobj 114 0 obj 71084 endobj 115 0 obj <>/ExtGState<>/XObject<>>>/Group<>/StructParents 5/Tabs/S>> endobj 116 0 obj <>stream 1 0 0 -1 0 841.90002441 cm q 1 0 0 1 56.70000076 70.90000153 cm /P <> BDC BT /FAAABG 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[(processing)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.76900101 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.4659996 73.78600311 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.90399933 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.60099792 73.78600311 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.91600037 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.61299896 73.78600311 Tm [(72)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.61299896 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.30999756 73.78600311 Tm [(hours)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.53199768 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.22900391 73.78600311 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.55900574 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.2559967 73.78600311 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.92599487 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.6230011 73.78600311 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.06100464 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.75799561 73.78600311 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32000732 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(processing)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.76900101 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.84899902 89.38600159 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.05599976 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.13600159 89.38600159 Tm [(colle)1(cted)] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.22499847 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.30500031 89.38600159 Tm [(respecti)1(vely.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.11599731 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.19599915 89.38600159 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.74299622 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 172.82299805 89.38600159 Tm [(tempe)1(rature)] TJ ET EMC /P <> BDC BT 1 0 0 -1 220.57200623 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.6519928 89.38600159 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32200623 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.21700001 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 17.33399963 104.98600006 Tm [(same)] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.88100052 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.9980011 104.98600006 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.32799911 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.44499969 104.98600006 Tm [(partic)1(le)] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.42500305 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.54199982 104.98600006 Tm [(check.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.35700226 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.47399902 104.98600006 Tm [(Fig.3)] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.31399536 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.43099976 104.98600006 Tm [(ill)1(us)-1(t)1(rates)] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.31300354 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.42999268 104.98600006 Tm [(that)] TJ ET EMC /P <> BDC BT 1 0 0 -1 207.42500305 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.54200745 104.98600006 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32000732 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(chemi)1(s)-1(t)1(ries)] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.54199982 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.84999847 120.58599854 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.05699921 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.36499786 120.58599854 Tm [(compat)1(ible)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.79399872 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.10199738 120.58599854 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.88000488 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.18800354 120.58599854 Tm [(typica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.3999939 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 163.70799255 120.58599854 Tm [(BEOL)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.81599426 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.12399292 120.58599854 Tm [(diele)1(ctric)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32099915 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.43799973 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.89299965 136.18600464 Tm [(meta)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.10499954 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.56000137 136.18600464 Tm [(films,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 70.61699677 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.0719986 136.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.51000214 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.96499634 136.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.18199921 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.63700104 136.18600464 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.29200745 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.74699402 136.18600464 Tm [(rate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.73199463 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 156.18699646 136.18600464 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.51699829 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.97200012 136.18600464 Tm [(Cu)] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.64199829 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.09700012 136.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.53500366 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.99000549 136.18600464 Tm [(low-k)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.32000732 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(mate)1(rials)] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.65000153 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.15000153 151.78599548 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.81999969 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.31999969 151.78599548 Tm [(less)] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.31999969 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 65.81999969 151.78599548 Tm [(than)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.03700256 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.53700256 151.78599548 Tm [(5)] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.75900269 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.25900269 151.78599548 Tm [(/mi)1(n.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.09400177 151.78599548 Tm /GS65 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 156 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 171.6000061 cm /P <> BDC q 1 0 0 1 0 5.2389946 cm q /GS66 gs 1 g 0 0 m 237.05661011 0 l 237.05661011 143.32078552 l 0 143.32078552 l h f* Q q /GS67 gs 0.84705883 G 0.75 w 0 0 m 237.05661011 0 l 237.05661011 143.32078552 l 0 143.32078552 l h s Q q 0 0 m 237.05661011 0 l 237.05661011 143.32078552 l 0 143.32078552 l h W n q 1 0 0 1 19.52099991 5 cm q 71.30200195 5.49316406 m 207.04244995 5.49316406 l 207.04244995 93.25178528 l 71.30200195 93.25178528 l h n Q q 71.30200195 5.49316406 m 207.04244995 5.49316406 l 207.04244995 93.25178528 l 71.30200195 93.25178528 l h W n q /GS68 gs 0.30980393 0.50588238 0.74117649 rg 77.11945343 18.65695572 m 84.87604523 18.65695572 l 84.87604523 93.25178528 l 77.11945343 93.25178528 l h f* Q q /GS69 gs 0.30980393 0.50588238 0.74117649 RG 2.25 w 1 J 77.11945343 18.65695572 m 84.87604523 18.65695572 l 84.87604523 93.25178528 l 77.11945343 93.25178528 l h s Q q /GS70 gs 0.30980393 0.50588238 0.74117649 rg 104.26753998 87.4597168 m 112.02413177 87.4597168 l 112.02413177 93.25178528 l 104.26753998 93.25178528 l h f* Q q /GS71 gs 0.30980393 0.50588238 0.74117649 RG 2.25 w 1 J 104.26753998 87.4597168 m 112.02413177 87.4597168 l 112.02413177 93.25178528 l 104.26753998 93.25178528 l h s Q q /GS72 gs 0.30980393 0.50588238 0.74117649 rg 131.41563416 72.89178467 m 139.17222595 72.89178467 l 139.17222595 93.25178528 l 131.41563416 93.25178528 l h f* Q q /GS73 gs 0.30980393 0.50588238 0.74117649 RG 2.25 w 1 J 131.41563416 72.89178467 m 139.17222595 72.89178467 l 139.17222595 93.25178528 l 131.41563416 93.25178528 l h s Q q /GS74 gs 0.30980393 0.50588238 0.74117649 rg 158.5637207 82.7207489 m 166.3203125 82.7207489 l 166.3203125 93.25178528 l 158.5637207 93.25178528 l h f* Q q /GS75 gs 0.30980393 0.50588238 0.74117649 RG 2.25 w 1 J 158.5637207 82.7207489 m 166.3203125 82.7207489 l 166.3203125 93.25178528 l 158.5637207 93.25178528 l h s Q q /GS76 gs 0.30980393 0.50588238 0.74117649 rg 185.71180725 76.40213013 m 193.46841431 76.40213013 l 193.46841431 93.25178528 l 185.71180725 93.25178528 l h f* Q q /GS77 gs 0.30980393 0.50588238 0.74117649 RG 2.25 w 1 J 185.71180725 76.40213013 m 193.46841431 76.40213013 l 193.46841431 93.25178528 l 185.71180725 93.25178528 l h s Q q /GS78 gs 0.75294119 0.3137255 0.3019608 rg 84.87604523 16.72626305 m 92.63263702 16.72626305 l 92.63263702 93.25178528 l 84.87604523 93.25178528 l h f* Q q /GS79 gs 0.75294119 0.3137255 0.3019608 RG 2.25 w 1 J 84.87604523 16.72626305 m 92.63263702 16.72626305 l 92.63263702 93.25178528 l 84.87604523 93.25178528 l h s Q q /GS80 gs 0.75294119 0.3137255 0.3019608 rg 112.02413177 86.75765228 m 119.7807312 86.75765228 l 119.7807312 93.25178528 l 112.02413177 93.25178528 l h f* Q q /GS81 gs 0.75294119 0.3137255 0.3019608 RG 2.25 w 1 J 112.02413177 86.75765228 m 119.7807312 86.75765228 l 119.7807312 93.25178528 l 112.02413177 93.25178528 l h s Q q /GS82 gs 0.75294119 0.3137255 0.3019608 rg 139.17222595 74.99799347 m 146.92881775 74.99799347 l 146.92881775 93.25178528 l 139.17222595 93.25178528 l h f* Q q /GS83 gs 0.75294119 0.3137255 0.3019608 RG 2.25 w 1 J 139.17222595 74.99799347 m 146.92881775 74.99799347 l 146.92881775 93.25178528 l 139.17222595 93.25178528 l h s Q q /GS84 gs 0.75294119 0.3137255 0.3019608 rg 166.3203125 90.26799011 m 174.07691956 90.26799011 l 174.07691956 93.25178528 l 166.3203125 93.25178528 l h f* Q q /GS85 gs 0.75294119 0.3137255 0.3019608 RG 2.25 w 1 J 166.3203125 90.26799011 m 174.07691956 90.26799011 l 174.07691956 93.25178528 l 166.3203125 93.25178528 l h s Q q /GS86 gs 0.75294119 0.3137255 0.3019608 rg 193.46841431 74.82247925 m 201.2250061 74.82247925 l 201.2250061 93.25178528 l 193.46841431 93.25178528 l h f* Q q /GS87 gs 0.75294119 0.3137255 0.3019608 RG 2.25 w 1 J 193.46841431 74.82247925 m 201.2250061 74.82247925 l 201.2250061 93.25178528 l 193.46841431 93.25178528 l h s Q Q q /GS88 gs 0.84705883 G 0.75 w 71.30200195 93.25178528 m 207.04244995 93.25178528 l S Q q /GS89 gs 0.84705883 G 0.75 w 71.30200195 93.25178528 m 71.30200195 5.4931612 l S Q q 1 0 0 1 -48.26589584 22.7998867 cm q 1 0 0 1 49.78315353 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 117.07830811 0 l 117.07830811 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 49.78300095 8.56900024 Tm /GS90 gs 0.34901962 g [(0)] TJ ET Q Q Q q 1 0 0 1 -48.26589584 5.24816465 cm q 1 0 0 1 49.78315353 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 117.07830811 0 l 117.07830811 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 49.78300095 8.56900024 Tm /GS91 gs 0.34901962 g [(1)] TJ ET Q Q Q q 1 0 0 1 -48.26589584 -12.30355835 cm q 1 0 0 1 49.78315353 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 117.07830811 0 l 117.07830811 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 49.78300095 8.56900024 Tm /GS92 gs 0.34901962 g [(2)] TJ ET Q Q Q q 1 0 0 1 -48.26589584 -29.85528564 cm q 1 0 0 1 49.78315353 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 117.07830811 0 l 117.07830811 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 49.78300095 8.56900024 Tm /GS93 gs 0.34901962 g [(3)] TJ ET Q Q Q q 1 0 0 1 -48.26589584 -47.40700912 cm q 1 0 0 1 49.78315353 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 117.07830811 0 l 117.07830811 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 49.78300095 8.56900024 Tm /GS94 gs 0.34901962 g [(4)] TJ ET Q Q Q q 1 0 0 1 -48.26589584 -64.9587326 cm q 1 0 0 1 49.78315353 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 117.07830811 0 l 117.07830811 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 49.78300095 8.56900024 Tm /GS95 gs 0.34901962 g [(5)] TJ ET Q Q Q q 1 0 0 1 0 93.25179291 cm q 1 0 0 1 69.69200134 -66.16739655 cm q 1 0 0 1 1.61054504 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 25.69809151 0 l 25.69809151 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 1.61000001 8.56900024 Tm /GS96 gs 0.34901962 g [(Cu)] TJ ET Q Q Q q 1 0 0 1 97.85002136 -66.16739655 cm q 1 0 0 1 0.0001218 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 26.89824295 0 l 26.89824295 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS97 gs 0.34901962 g [(FS)-1(G)] TJ ET Q Q Q q 1 0 0 1 125.22918701 -66.16739655 cm q 1 0 0 1 0.36904529 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 25.69809151 0 l 25.69809151 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0.36899999 8.56900024 Tm /GS98 gs 0.34901962 g [(Si)-1(N)] TJ ET Q Q Q q 1 0 0 1 152.50326538 -66.16739655 cm q 1 0 0 1 0.24354577 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 25.69809151 0 l 25.69809151 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0.24300002 8.56900024 Tm /GS99 gs 0.34901962 g [(Ti)-1(N)] TJ ET Q Q Q q 1 0 0 1 178.7713623 -66.16739655 cm q 1 0 0 1 0.0000689 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 27.94413948 0 l 27.94413948 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS100 gs 0.34901962 g [(BD1)] TJ ET Q Q Q q /GS101 gs 0.84705883 G 0.75 w 71.30200195 13.0690012 m 71.30200195 0 l S Q q /GS102 gs 0.84705883 G 0.75 w 71.30200195 0 m 98.4500885 0 l S Q q /GS103 gs 0.84705883 G 0.75 w 98.4500885 13.0690012 m 98.4500885 0 l S Q q /GS104 gs 0.84705883 G 0.75 w 98.4500885 0 m 125.59818268 0 l S Q q /GS105 gs 0.84705883 G 0.75 w 125.59818268 13.0690012 m 125.59818268 0 l S Q q /GS106 gs 0.84705883 G 0.75 w 125.59818268 0 m 152.74627686 0 l S Q q /GS107 gs 0.84705883 G 0.75 w 152.74627686 13.0690012 m 152.74627686 0 l S Q q /GS108 gs 0.84705883 G 0.75 w 152.74627686 0 m 179.89437866 0 l S Q q /GS109 gs 0.84705883 G 0.75 w 179.89437866 13.0690012 m 179.89437866 0 l S Q q /GS110 gs 0.84705883 G 0.75 w 207.04246521 13.0690012 m 207.04246521 0 l S Q q /GS111 gs 0.84705883 G 0.75 w 179.89437866 0 m 207.04246521 0 l S Q q 1 0 0 1 0 13.0690012 cm q /GS112 gs 0.30980393 0.50588238 0.74117649 rg 3.60000014 3.60000014 m 9 3.60000014 l 9 9 l 3.60000014 9 l h f* Q q /GS113 gs 0.30980393 0.50588238 0.74117649 RG 2.25 w 1 J 3.60000014 3.60000014 m 9 3.60000014 l 9 9 l 3.60000014 9 l h s Q q 1 0 0 1 -4.1044364 -65.73673248 cm q 1 0 0 1 8.15443707 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 77.56887817 0 l 77.56887817 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS114 gs 0.34901962 g [(ST)-1(25)1(0 \()-1(fr)1(esh)-1(\))] TJ ET Q Q Q q 1 0 0 1 69.69776917 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS115 gs 0.34901962 g [(4.25)] TJ ET Q Q Q q 1 0 0 1 96.84585571 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS116 gs 0.34901962 g [(0.33)] TJ ET Q Q Q q 1 0 0 1 123.99394989 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS117 gs 0.34901962 g [(1.16)] TJ ET Q Q Q q 1 0 0 1 152.07026672 -65.9519043 cm q 1 0 0 1 0.67654526 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 25.69809151 0 l 25.69809151 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0.676 8.56900024 Tm /GS118 gs 0.34901962 g [(0.6)] TJ ET Q Q Q q 1 0 0 1 178.29016113 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS119 gs 0.34901962 g [(0.96)] TJ ET Q Q Q q /GS120 gs 0.84705883 G 0.75 w 0 13.5 m 0 0 l S Q q /GS121 gs 0.84705883 G 0.75 w 71.30200195 13.5 m 71.30200195 0 l S Q q /GS122 gs 0.84705883 G 0.75 w 0 0 m 71.30200195 0 l S Q q /GS123 gs 0.84705883 G 0.75 w 71.30200195 13.5 m 71.30200195 0 l S Q q /GS124 gs 0.84705883 G 0.75 w 71.30200195 0 m 98.4500885 0 l S Q q /GS125 gs 0.84705883 G 0.75 w 98.4500885 13.5 m 98.4500885 0 l S Q q /GS126 gs 0.84705883 G 0.75 w 98.4500885 0 m 125.59818268 0 l S Q q /GS127 gs 0.84705883 G 0.75 w 125.59818268 13.5 m 125.59818268 0 l S Q q /GS128 gs 0.84705883 G 0.75 w 125.59818268 0 m 152.74627686 0 l S Q q /GS129 gs 0.84705883 G 0.75 w 152.74627686 13.5 m 152.74627686 0 l S Q q /GS130 gs 0.84705883 G 0.75 w 152.74627686 0 m 179.89437866 0 l S Q q /GS131 gs 0.84705883 G 0.75 w 179.89437866 13.5 m 179.89437866 0 l S Q q /GS132 gs 0.84705883 G 0.75 w 207.04246521 13.5 m 207.04246521 0 l S Q q /GS133 gs 0.84705883 G 0.75 w 179.89437866 0 m 207.04246521 0 l S Q Q q 1 0 0 1 0 26.56900215 cm q /GS134 gs 0.75294119 0.3137255 0.3019608 rg 3.60000014 3.60000014 m 9 3.60000014 l 9 9 l 3.60000014 9 l h f* Q q /GS135 gs 0.75294119 0.3137255 0.3019608 RG 2.25 w 1 J 3.60000014 3.60000014 m 9 3.60000014 l 9 9 l 3.60000014 9 l h s Q q 1 0 0 1 -0.48343751 -65.73673248 cm q 1 0 0 1 4.53343773 0 cm q 1 0 0 1 7.20000029 66.16739655 cm -12.94999981 0 m 77.56887817 0 l 77.56887817 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS136 gs 0.34901962 g [(ICS)-1(8)1(000 \(f)-1(r)1(esh\))] TJ ET Q Q Q q 1 0 0 1 69.69776917 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS137 gs 0.34901962 g [(4.36)] TJ ET Q Q Q q 1 0 0 1 96.84585571 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS138 gs 0.34901962 g [(0.37)] TJ ET Q Q Q q 1 0 0 1 123.99394989 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS139 gs 0.34901962 g [(1.04)] TJ ET Q Q Q q 1 0 0 1 151.14204407 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS140 gs 0.34901962 g [(0.17)] TJ ET Q Q Q q 1 0 0 1 178.29016113 -65.9519043 cm q 1 0 0 1 -0.00022761 0 cm q 1 0 0 1 7.19999933 66.16739655 cm -12.94999981 0 m 28.90654373 0 l 28.90654373 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAACB 9 Tf 1 0 0 -1 0 8.56900024 Tm /GS141 gs 0.34901962 g [(1.05)] TJ ET Q Q Q q /GS142 gs 0.84705883 G 0.75 w 0 13.5 m 0 0 l S Q q /GS143 gs 0.84705883 G 0.75 w 71.30200195 13.5 m 71.30200195 0 l S Q q /GS144 gs 0.84705883 G 0.75 w 0 0 m 71.30200195 0 l S Q q /GS145 gs 0.84705883 G 0.75 w 0 13.5 m 71.30200195 13.5 l S Q q /GS146 gs 0.84705883 G 0.75 w 71.30200195 13.5 m 71.30200195 0 l S Q q /GS147 gs 0.84705883 G 0.75 w 71.30200195 0 m 98.4500885 0 l S Q q /GS148 gs 0.84705883 G 0.75 w 71.30200195 13.5 m 98.4500885 13.5 l S Q q /GS149 gs 0.84705883 G 0.75 w 98.4500885 13.5 m 98.4500885 0 l S Q q /GS150 gs 0.84705883 G 0.75 w 98.4500885 0 m 125.59818268 0 l S Q q /GS151 gs 0.84705883 G 0.75 w 98.4500885 13.5 m 125.59818268 13.5 l S Q q /GS152 gs 0.84705883 G 0.75 w 125.59818268 13.5 m 125.59818268 0 l S Q q /GS153 gs 0.84705883 G 0.75 w 125.59818268 0 m 152.74627686 0 l S Q q /GS154 gs 0.84705883 G 0.75 w 125.59818268 13.5 m 152.74627686 13.5 l S Q q /GS155 gs 0.84705883 G 0.75 w 152.74627686 13.5 m 152.74627686 0 l S Q q /GS156 gs 0.84705883 G 0.75 w 152.74627686 0 m 179.89437866 0 l S Q q /GS157 gs 0.84705883 G 0.75 w 152.74627686 13.5 m 179.89437866 13.5 l S Q q /GS158 gs 0.84705883 G 0.75 w 179.89437866 13.5 m 179.89437866 0 l S Q q /GS159 gs 0.84705883 G 0.75 w 207.04246521 13.5 m 207.04246521 0 l S Q q /GS160 gs 0.84705883 G 0.75 w 179.89437866 0 m 207.04246521 0 l S Q q /GS161 gs 0.84705883 G 0.75 w 179.89437866 13.5 m 207.04246521 13.5 l S Q Q Q Q q 1 0 0 1 63.50823975 14.25631905 cm q 1 0 0 1 -58.42823792 17.62632942 cm q 0 -1 1 0 -7.12865496 84.962677 cm q 1 0 0 1 7.19999933 65.5568924 cm -12.94999981 0 m 127.61447144 0 l 127.61447144 136.12078857 l -12.94999981 136.12078857 l h W n BT /FAAADG 10 Tf 1 0 0 -1 19.27400017 9.52099991 Tm /GS162 gs 0.34901962 g [(Et)1(c)-1(h rate / min-1)] TJ ET Q Q Q Q Q Q EMC /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 238.50700378 150.75999451 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 327.6000061 cm /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 0 11.10499954 Tm /GS163 gs 0 g [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.25599957 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.50600052 11.10499954 Tm [(3.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.25600052 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.50600052 11.10499954 Tm [(Comparison)] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.5039978 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.7539978 11.10499954 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.25099945 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.50099945 11.10499954 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 92.4960022 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.7460022 11.10499954 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.73600006 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.98600006 11.10499954 Tm [(rate)] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.47299957 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.72299957 11.10499954 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.21699524 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.46699524 11.10499954 Tm [(different)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.44799805 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.69799805 11.10499954 Tm [(films)] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.19900513 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.44900513 11.10499954 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 200.94400024 11.10499954 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.19400024 11.10499954 Tm [(40)] TJ ET EMC /P <> BDC BT /FAAAFA 9 Tf 1 0 0 -1 212.19400024 11.10499954 Tm [<0003>] TJ ET EMC /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 221.19400024 11.10499954 Tm /GS164 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 343.20001221 cm /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 358.79998779 cm /P <> BDC BT /FAAAEF 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS165 gs 0 g [(2.4)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.5 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 15 11.38599968 Tm [(Suspected)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.98500061 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.48500061 11.38599968 Tm [(mechanism)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.47499847 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.97499847 11.38599968 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.75299835 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.25299835 11.38599968 Tm [(ball)] TJ ET EMC /P <> BDC BT 1 0 0 -1 130.80999756 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.30999756 11.38599968 Tm [(defec)1(t)] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.18200684 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.68200684 11.38599968 Tm [(formation)] TJ ET EMC /P <> BDC BT /FAAACB 10 Tf 1 0 0 -1 199.13000488 11.38599968 Tm /GS166 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 374.3999939 cm /P <> BDC q 1 0 0 1 0 1.75 cm q 0 0 m 242.92318726 0 l 242.92318726 74.49999237 l 0 74.49999237 l h W n q 0.24292319 0 0 0.07853761 0 -4.03683329 cm 0 51.40000153 m 1000 51.40000153 l 1000 999.98999023 l 0 999.98999023 l h W n q 2.00400805 0 0 5.26315784 0 0 cm 0 0 m 499 0 l 499 190 l 0 190 l h W n q 0.00010499 0 0 0.00010499 0.49994752 22.50005341 cm q /GS167 gs 0.30980393 0.50588238 0.74117649 rg 0 0 m 2971800 0 l 2971800 1066800 l 0 1066800 l h f* Q q /GS168 gs 0.30980393 0.50588238 0.74117649 RG 9534.52539063 w 0 0 m 2971800 0 l 2971800 0 l 2971800 1066800 l 2971800 1066800 l 0 1066800 l h s Q Q q 0.00010499 0 0 0.00010499 0.49994752 6.50005245 cm q /GS169 gs 0 0.80000001 1 rg 0 0 m 2971800 0 l 2971800 152400 l 0 152400 l h f* Q q /GS170 gs 0 0.80000001 1 RG 9534.52539063 w 0 0 m 2971800 0 l 2971800 0 l 2971800 152400 l 2971800 152400 l 0 152400 l h s Q Q q 0.00010499 0 0 0.00010499 0 134 cm q /GS171 gs 1 0.60000002 0 rg 0 0 m 2971800 0 l 2971800 533400 l 0 533400 l h f* Q Q q 0 0 m 499 0 l 499 190 l 0 190 l h W n q 1 0 0 1 70.08414459 170.41438293 cm BT /FAACCF 21 Tf 1 0 0 -1 0 0 Tm /GS172 gs 0 g [(U)] TJ ET q 1 0 0 1 14 0 cm BT 1 0 0 -1 0 0 Tm [(n)] TJ ET Q q 1 0 0 1 27 0 cm BT 1 0 0 -1 0 0 Tm [(d)] TJ ET Q q 1 0 0 1 40 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 52 0 cm BT 1 0 0 -1 0 0 Tm [(r)] TJ ET Q q 1 0 0 1 60 0 cm BT 1 0 0 -1 0 0 Tm [(l)] TJ ET Q q 1 0 0 1 65 0 cm BT 1 0 0 -1 0 0 Tm [(a)] TJ ET Q q 1 0 0 1 77 0 cm BT 1 0 0 -1 0 0 Tm [(y)] TJ ET Q q 1 0 0 1 88 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 100 0 cm BT 1 0 0 -1 0 0 Tm [(r)] TJ ET Q Q Q q 0 0 m 499 0 l 499 190 l 0 190 l h W n q 1 0 0 1 187.08415222 170.41438293 cm BT /FAACCF 21 Tf 1 0 0 -1 0 0 Tm /GS173 gs 0 g [(m)] TJ ET q 1 0 0 1 19 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 31 0 cm BT 1 0 0 -1 0 0 Tm [(t)] TJ ET Q q 1 0 0 1 38 0 cm BT 1 0 0 -1 0 0 Tm [(a)] TJ ET Q q 1 0 0 1 50 0 cm BT 1 0 0 -1 0 0 Tm [(l)] TJ ET Q Q Q q 0.00010499 0 0 0.00010499 0.49994752 126.50005341 cm q /GS174 gs 0 0 1 rg 0 0 m 2971800 0 l 2971800 76200 l 0 76200 l h f* Q q /GS175 gs 0 0 1 RG 9534.52539063 w 0 0 m 2971800 0 l 2971800 0 l 2971800 76200 l 2971800 76200 l 0 76200 l h s Q Q q 0.00010499 0 0 0.00010499 48.49994659 6.50005245 cm q /GS176 gs 1 g 0 0 m 381000 0 l 381000 1219200 l 0 1219200 l h f* Q q /GS177 gs 1 G 9534.52539063 w 0 0 m 381000 0 l 381000 0 l 381000 1219200 l 381000 1219200 l 0 1219200 l h s Q Q q 0.00010499 0 0 0.00010499 136.49995422 6.50005245 cm q /GS178 gs 1 g 0 0 m 381000 0 l 381000 1219200 l 0 1219200 l h f* Q q /GS179 gs 1 G 9534.52539063 w 0 0 m 381000 0 l 381000 0 l 381000 1219200 l 381000 1219200 l 0 1219200 l h s Q Q q 0.00010499 0 0 0.00010499 240.49995422 6.50005245 cm q /GS180 gs 1 g 0 0 m 381000 0 l 381000 1219200 l 0 1219200 l h f* Q q /GS181 gs 1 G 9534.52539063 w 0 0 m 381000 0 l 381000 0 l 381000 1219200 l 381000 1219200 l 0 1219200 l h s Q Q q 0 0 m 499 0 l 499 190 l 0 190 l h W n q 1 0 0 1 324.12094116 140.44400024 cm BT /FAACCF 21 Tf 1 0 0 -1 0 0 Tm /GS182 gs 0 g [(E)] TJ ET q 1 0 0 1 14 0 cm BT 1 0 0 -1 0 0 Tm [(t)] TJ ET Q q 1 0 0 1 21 0 cm BT 1 0 0 -1 0 0 Tm [(c)] TJ ET Q q 1 0 0 1 33 0 cm BT 1 0 0 -1 0 0 Tm [(h)] TJ ET Q q 1 0 0 1 46 0 cm BT 1 0 0 -1 0 0 Tm [( )] TJ ET Q q 1 0 0 1 52 0 cm BT 1 0 0 -1 0 0 Tm [(s)] TJ ET Q q 1 0 0 1 64 0 cm BT 1 0 0 -1 0 0 Tm [(t)] TJ ET Q q 1 0 0 1 71 0 cm BT 1 0 0 -1 0 0 Tm [(o)] TJ ET Q q 1 0 0 1 84 0 cm BT 1 0 0 -1 0 0 Tm [(p)] TJ ET Q q 1 0 0 1 97 0 cm BT 1 0 0 -1 0 0 Tm [( )] TJ ET Q q 1 0 0 1 103 0 cm BT 1 0 0 -1 0 0 Tm [(l)] TJ ET Q q 1 0 0 1 108 0 cm BT 1 0 0 -1 0 0 Tm [(a)] TJ ET Q q 1 0 0 1 120 0 cm BT 1 0 0 -1 0 0 Tm [(y)] TJ ET Q q 1 0 0 1 131 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 143 0 cm BT 1 0 0 -1 0 0 Tm [(r)] TJ ET Q Q Q q 0 0 m 499 0 l 499 190 l 0 190 l h W n q 1 0 0 1 324.12084961 86.24252319 cm BT /FAACCF 21 Tf 1 0 0 -1 0 0 Tm /GS183 gs 0 g [(L)] TJ ET q 1 0 0 1 13 0 cm BT 1 0 0 -1 0 0 Tm [(o)] TJ ET Q q 1 0 0 1 26 0 cm BT 1 0 0 -1 0 0 Tm [(w)] TJ ET Q Q Q q 0 0 m 499 0 l 499 190 l 0 190 l h W n q 1 0 0 1 365.12084961 86.24252319 cm BT /FAACCF 21 Tf 1 0 0 -1 0 0 Tm /GS184 gs 0 g [(-)] TJ ET Q Q q 0 0 m 499 0 l 499 190 l 0 190 l h W n q 1 0 0 1 372.12084961 86.24252319 cm BT /FAACCF 21 Tf 1 0 0 -1 0 0 Tm /GS185 gs 0 g [(k)] TJ ET q 1 0 0 1 12 0 cm BT 1 0 0 -1 0 0 Tm [( )] TJ ET Q q 1 0 0 1 20 0 cm BT 1 0 0 -1 0 0 Tm [(d)] TJ ET Q q 1 0 0 1 33 0 cm BT 1 0 0 -1 0 0 Tm [(i)] TJ ET Q q 1 0 0 1 38 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 50 0 cm BT 1 0 0 -1 0 0 Tm [(l)] TJ ET Q q 1 0 0 1 55 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 67 0 cm BT 1 0 0 -1 0 0 Tm [(c)] TJ ET Q q 1 0 0 1 79 0 cm BT 1 0 0 -1 0 0 Tm [(t)] TJ ET Q q 1 0 0 1 86 0 cm BT 1 0 0 -1 0 0 Tm [(r)] TJ ET Q q 1 0 0 1 94 0 cm BT 1 0 0 -1 0 0 Tm [(i)] TJ ET Q q 1 0 0 1 99 0 cm BT 1 0 0 -1 0 0 Tm [(c)] TJ ET Q Q Q q 0 0 m 499 0 l 499 190 l 0 190 l h W n q 1 0 0 1 324.12094116 27.04556465 cm BT /FAACCF 21 Tf 1 0 0 -1 0 0 Tm /GS186 gs 0 g [(D)] TJ ET q 1 0 0 1 15 0 cm BT 1 0 0 -1 0 0 Tm [(i)] TJ ET Q q 1 0 0 1 20 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 32 0 cm BT 1 0 0 -1 0 0 Tm [(l)] TJ ET Q q 1 0 0 1 37 0 cm BT 1 0 0 -1 0 0 Tm [(e)] TJ ET Q q 1 0 0 1 49 0 cm BT 1 0 0 -1 0 0 Tm [(c)] TJ ET Q q 1 0 0 1 61 0 cm BT 1 0 0 -1 0 0 Tm [(t)] TJ ET Q q 1 0 0 1 68 0 cm BT 1 0 0 -1 0 0 Tm [(r)] TJ ET Q q 1 0 0 1 76 0 cm BT 1 0 0 -1 0 0 Tm [(i)] TJ ET Q q 1 0 0 1 81 0 cm BT 1 0 0 -1 0 0 Tm [(c)] TJ ET Q q 1 0 0 1 93 0 cm BT 1 0 0 -1 0 0 Tm [( )] TJ ET Q q 1 0 0 1 101 0 cm BT 1 0 0 -1 0 0 Tm [(A)] TJ ET Q q 1 0 0 1 116 0 cm BT 1 0 0 -1 0 0 Tm [(R)] TJ ET Q q 1 0 0 1 131 0 cm BT 1 0 0 -1 0 0 Tm [(C)] TJ ET Q Q Q Q Q Q Q EMC /P <> BDC BT /FAAACB 10 Tf 1 0 0 -1 242.94999695 76.25 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 452.3999939 cm /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 0 11.02700043 Tm /GS187 gs 0 g [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.25599957 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.50600052 11.02700043 Tm [(4.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 23.25600052 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.50600052 11.02700043 Tm [(Schemat)1(ic)] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.99100113 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 65.24099731 11.02700043 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 72.73799896 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.98799896 11.02700043 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.98300171 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.23300171 11.02700043 Tm [(single)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.73100281 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.98100281 11.02700043 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.45700073 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.70700073 11.02700043 Tm [(structure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.19400024 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.44400024 11.02700043 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.44400024 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.69400024 11.02700043 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.69700623 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.94700623 11.02700043 Tm [(test.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 226.69500732 11.02700043 Tm /GS188 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 468 cm /P <> BDC BT /FAAACB 10 Tf 1 0 0 -1 0 11.21700001 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 483.6000061 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS189 gs 0 g [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 15.54699993 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 18.04700089 11.38599968 Tm [(single)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.93399811 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.43399811 11.38599968 Tm [(damasce)1(ne)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.29599762 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.79599762 11.38599968 Tm [(structure)] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.78099823 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.28100586 11.38599968 Tm [(wafers)] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.93099976 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.43099976 11.38599968 Tm [(were)] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.86000061 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.36000061 11.38599968 Tm [(prepared)] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.33599854 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 216.83599854 11.38599968 Tm [(by)] TJ ET EMC /P <> BDC BT 1 0 0 -1 226.83599854 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.21700001 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.71700001 26.98600006 Tm [(conventi)1(onal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.36699677 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.86699677 26.98600006 Tm [(DUV)] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.53199768 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.03199768 26.98600006 Tm [(lit)1(hogr)-1(a)1(phy)] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.13600159 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.63600159 26.98600006 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 156.07400513 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.57400513 26.98600006 Tm [(dry)] TJ ET EMC /P <> BDC BT 1 0 0 -1 171.90400696 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.40400696 26.98600006 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.05900574 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(sequence,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.14599991 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.64599991 42.58599854 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.97600174 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.47600174 42.58599854 Tm [(shown)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.58899689 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.08899689 42.58599854 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.86699677 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.36699677 42.58599854 Tm [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.20700073 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.70700073 42.58599854 Tm [(4.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.20700073 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.70700073 42.58599854 Tm [(After)] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.80599976 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 143.30599976 42.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.522995 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.022995 42.58599854 Tm [(etch)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.67799377 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 177.17799377 42.58599854 Tm [(stop)] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.8480072 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.3480072 42.58599854 Tm [(layer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 216.33299255 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.83299255 42.58599854 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 225.50300598 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(etche)1(d,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.59399986 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.09399986 58.18599701 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.31100082 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.81100082 58.18599701 Tm [(underlaye)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 88.56500244 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 91.06500244 58.18599701 Tm [(meta)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.27700043 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.77700043 58.18599701 Tm [(film)] TJ ET EMC /P <> BDC BT 1 0 0 -1 132.44200134 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.94200134 58.18599701 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.61199951 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.11199951 58.18599701 Tm [(exposed.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.3809967 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.8809967 58.18599701 Tm [(Before)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.08799744 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.58799744 58.18599701 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.80499268 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(deposition)] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.66500092 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.16500092 73.78600311 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.49499893 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.99499893 73.78600311 Tm [(next-le)1(vel)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.97499847 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.47499847 73.78600311 Tm [(meta)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.68699646 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.18699646 73.78600311 Tm [(layer,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.67199707 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.17199707 73.78600311 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.38900757 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.88900757 73.78600311 Tm [(wafers)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.53900146 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.03900146 73.78600311 Tm [(were)] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.46800232 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(clea)1(ned)] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.53199959 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 33.0320015 89.38600159 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.81000137 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 43.31000137 89.38600159 Tm [(www.6163.com)] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.09300232 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.59300232 89.38600159 Tm [(single-wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.56900024 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.06900024 89.38600159 Tm [(tool)] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.62600708 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.12600708 89.38600159 Tm [(by)] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.12600708 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.62600708 89.38600159 Tm [(using)] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.29600525 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.79600525 89.38600159 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 202.46600342 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.96600342 89.38600159 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.40400696 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(ICS8000.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.06200027 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.56200027 104.98600006 Tm [(Dark-field)] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.20800018 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.70800018 104.98600006 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.13200378 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.63200378 104.98600006 Tm [(inspecti)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 152.73599243 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.23599243 104.98600006 Tm [(tool)] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.79299927 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 173.29299927 104.98600006 Tm [(was)] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.84500122 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.34500122 104.98600006 Tm [(used)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.67500305 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 212.17500305 104.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.95300293 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(scan)] TJ ET EMC /P <> BDC BT 1 0 0 -1 17.7689991 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 20.2689991 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.48600006 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.98600006 120.58599854 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.40999985 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.90999985 120.58599854 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.22499847 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.72499847 120.58599854 Tm [(wet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.16300201 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.66300201 120.58599854 Tm [(clea)1(n.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.25700378 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 125.75700378 120.58599854 Tm [(As)] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.86999512 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.36999512 120.58599854 Tm [(shown)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.48300171 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.98300171 120.58599854 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.76100159 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.26100159 120.58599854 Tm [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.10099792 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.60099792 120.58599854 Tm [(5,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.10099792 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 206.60099792 120.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.81799316 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.67000008 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.17000008 136.18600464 Tm [(has)] TJ ET EMC /P <> BDC BT 1 0 0 -1 42.5 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 45 136.18600464 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.43799973 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.93799973 136.18600464 Tm [(ball)] TJ ET EMC /P <> BDC BT 1 0 0 -1 66.93299866 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.43299866 136.18600464 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.85700226 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.35700226 136.18600464 Tm [(issue.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.85700226 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.35700226 136.18600464 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.90400696 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.40400696 136.18600464 Tm [(typica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 166.61599731 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.11599731 136.18600464 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.53999329 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.03999329 136.18600464 Tm [(map)] TJ ET EMC /P <> BDC BT 1 0 0 -1 213.25700378 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(shows)] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.00499916 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.50499916 151.78599548 Tm [(a)] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.94300079 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.44300079 151.78599548 Tm [(ring)] TJ ET EMC /P <> BDC BT 1 0 0 -1 50.55099869 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.05099869 151.78599548 Tm [(shape)] TJ ET EMC /P <> BDC BT 1 0 0 -1 75.81999969 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.31999969 151.78599548 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.09799957 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.59799957 151.78599548 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.81500244 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.31500244 151.78599548 Tm [(inner)] TJ ET EMC /P <> BDC BT 1 0 0 -1 133.86199951 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.36199951 151.78599548 Tm [(radium)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.68699646 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.18699646 151.78599548 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 175.51699829 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.01699829 151.78599548 Tm [(around)] TJ ET EMC /P <> BDC BT 1 0 0 -1 205.78599548 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.28599548 151.78599548 Tm [(20-)] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.38600159 Tm [(30mm.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.05699921 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 30.55699921 167.38600159 Tm [(SEM)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.11899948 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.61899948 167.38600159 Tm [(image)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.94400024 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.44400024 167.38600159 Tm [(reveal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.86799622 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.36799622 167.38600159 Tm [(that)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.36299896 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.86300659 167.38600159 Tm [(these)] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.41000366 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.91000366 167.38600159 Tm [(defect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.2250061 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.7250061 167.38600159 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.93200684 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 197.43200684 167.38600159 Tm [(mainl)1(y)] TJ ET EMC /P <> BDC BT 1 0 0 -1 225.20500183 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(ball-t)1(ype)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.54199982 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.04199982 182.98600769 Tm [(defect)1(.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.96600342 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.46600342 182.98600769 Tm [(Through)] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.90399933 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.40399933 182.98600769 Tm [(mecha)1(nism)] TJ ET EMC /P <> BDC BT 1 0 0 -1 149.94599915 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 152.44599915 182.98600769 Tm [(analysis)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.66299438 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.16299438 182.98600769 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.94099426 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 197.44099426 182.98600769 Tm [(solve)] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.54899597 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 198.58599854 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.44799995 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.94799995 198.58599854 Tm [(issue,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.44800186 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.94800186 198.58599854 Tm [(improvem)1(ents)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.16000366 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.66000366 198.58599854 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.43800354 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.93800354 198.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 124.15499878 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.65499878 198.58599854 Tm [(methods)] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.54200745 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 163.04200745 198.58599854 Tm [(were)] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.47099304 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.97099304 198.58599854 Tm [(made.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.12600708 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 211.62600708 198.58599854 Tm [(On)] TJ ET EMC /P <> BDC BT 1 0 0 -1 223.8480072 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 214.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.21700001 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.71700001 214.18600464 Tm [(other)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.26399994 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.76399994 214.18600464 Tm [(hand,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.70199966 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.20199966 214.18600464 Tm [(when)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.86199951 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.36199951 214.18600464 Tm [(tested)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.68699646 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.18699646 214.18600464 Tm [(with)] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.96499634 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 132.46499634 214.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.68200684 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.18200684 214.18600464 Tm [(low-viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.06900024 214.18600464 Tm [( )] TJ ET EMC Q q 1 0 0 1 251.57499695 0 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS190 gs 0 g [(ICS8000,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.06200027 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 40.56200027 11.38599968 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.00999832 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.50999832 11.38599968 Tm [(type)] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.72699738 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.22699738 11.38599968 Tm [(ball)] TJ ET EMC /P <> BDC BT 1 0 0 -1 92.22200012 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.72200012 11.38599968 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.14600372 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.64600372 11.38599968 Tm [(can)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.522995 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.022995 11.38599968 Tm [(not)] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.80099487 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.30099487 11.38599968 Tm [(be)] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.73899841 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.23899841 11.38599968 Tm [(observed.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.83799744 11.38599968 Tm /GS191 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 15.60000038 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 31.20000076 cm /P <> BDC q 1 0 0 1 0 0.17500611 cm q 251 0 0 -140.05000305 0 140.05000305 cm /GS192 gs /X3 Do Q Q EMC /P <> BDC BT /FAAAAH 10 Tf 1 0 0 -1 252 140.2250061 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 171.6000061 cm /P <> BDC BT /FAAABG 9 Tf 1 0 0 -1 0 11.02700043 Tm /GS193 gs 0 g [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.25599957 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 17.89299965 11.02700043 Tm [(5.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 24.64299965 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.28000069 11.02700043 Tm [(Defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.26100159 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.89799881 11.02700043 Tm [(map)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.39299774 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 75.02999878 11.02700043 Tm [(for)] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.52400208 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.16100311 11.02700043 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.16100311 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.79799652 11.02700043 Tm [(chemi)1(cals)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.77999878 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.41700745 11.02700043 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 161.41200256 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.04899597 11.02700043 Tm [(SEM)] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.55400085 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.19099426 11.02700043 Tm [(top-view)] TJ ET EMC /P <> BDC BT 1 0 0 -1 219.18299866 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.82000732 11.02700043 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 230.31700134 11.02700043 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.62700081 Tm [(defect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.48399925 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.73399925 26.62700081 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 34.22900009 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.47900009 26.62700081 Tm [(cente)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.45999908 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 60.70999908 26.62700081 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.20700073 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 70.45700073 26.62700081 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.94000244 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.19000244 26.62700081 Tm [(after)] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.6740036 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.9240036 26.62700081 Tm [(ST250)] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.92700195 26.62700081 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.17700195 26.62700081 Tm [(clea)1(ning.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.91200256 26.62700081 Tm /GS194 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 202.80000305 cm /P <> BDC BT /FAAACB 10.5 Tf 1 0 0 -1 0 11.38799953 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 218.3999939 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS195 gs 0 g [(Hypothesis)] TJ ET EMC /P <> BDC BT 1 0 0 -1 45 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.5 11.38599968 Tm [(1:)] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.27799988 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.77799988 11.38599968 Tm /GS196 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 234 cm /P <> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS197 gs 0 g [(Hitoshi)] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.44799995 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.94799995 11.38599968 Tm [(et)] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.16500092 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.66500092 11.38599968 Tm [(al.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 51.38199997 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 53.88199997 11.38599968 Tm [(found)] TJ ET EMC /P <> BDC BT 1 0 0 -1 77.21199799 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.71199799 11.38599968 Tm [(that)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.70700073 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.20700073 11.38599968 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.98500061 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.48500061 11.38599968 Tm [(single-wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.46099854 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 159.96099854 11.38599968 Tm [(wet)] TJ ET EMC /P <> BDC BT 1 0 0 -1 174.39900208 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.89900208 11.38599968 Tm [(clea)1(ner,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.26100159 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.76100159 11.38599968 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.97799683 11.38599968 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 26.98600006 Tm [(local)] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.43400002 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.93400002 26.98600006 Tm [(thickne)1(s)-1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.15100098 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.65100098 26.98600006 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.98100281 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 72.48100281 26.98600006 Tm [(water)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.68800354 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.18800354 26.98600006 Tm [(layer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.17299652 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.67299652 26.98600006 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.34300232 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.84300232 26.98600006 Tm [(relat)1(ed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 156.04499817 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.54499817 26.98600006 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 166.32299805 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.82299805 26.98600006 Tm [(various)] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.26100159 26.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 42.58599854 Tm [(parame)1(ters,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 46.36199951 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.86199951 42.58599854 Tm [(such)] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.19200134 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.69200134 42.58599854 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.02200317 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.52200317 42.58599854 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.28099823 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 105.78099823 42.58599854 Tm [(rotati)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.88499451 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.38499451 42.58599854 Tm [(speed)] TJ ET EMC /P <> BDC BT 1 0 0 -1 162.15400696 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.65400696 42.58599854 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.09199524 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.59199524 42.58599854 Tm [(radica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 208.79400635 42.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 58.18599701 Tm [(distance)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.76399994 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.26399994 58.18599701 Tm [(from)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.70199966 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 57.20199966 58.18599701 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.96099854 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 82.46099854 58.18599701 Tm [(cente)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 106.88500214 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 109.38500214 58.18599701 Tm [([4].)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.54499817 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.04499817 58.18599701 Tm [(As)] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.15800476 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.65800476 58.18599701 Tm [(shown)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.77099609 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.27099609 58.18599701 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.04899597 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.54899597 58.18599701 Tm [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.38900757 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.88900757 58.18599701 Tm [(6\(b\),)] TJ ET EMC /P <> BDC BT 1 0 0 -1 216.04899597 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 218.54899597 58.18599701 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 225.76600647 58.18599701 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 73.78600311 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 12.21700001 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.71700001 73.78600311 Tm [(rotati)1(on)] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.82099915 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.32099915 73.78600311 Tm [(rates)] TJ ET EMC /P <> BDC BT 1 0 0 -1 67.19799805 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.69799805 73.78600311 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.02799988 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.52799988 73.78600311 Tm [(200,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.02799988 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 100.52799988 73.78600311 Tm [(500)] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.52799988 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 118.02799988 73.78600311 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 132.46600342 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.96600342 73.78600311 Tm [(1400)] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.96600342 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.46600342 73.78600311 Tm [(rpm,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.07400513 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.57400513 73.78600311 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.79100037 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.29100037 73.78600311 Tm [(water)] TJ ET EMC /P <> BDC BT 1 0 0 -1 215.4980011 73.78600311 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 89.38600159 Tm [(layer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.98500061 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.48500061 89.38600159 Tm [(thickne)1(s)-1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.70199966 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.20199966 89.38600159 Tm [(does)] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.53199768 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.03199768 89.38600159 Tm [(not)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.80999756 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 98.30999756 89.38600159 Tm [(present)] TJ ET EMC /P <> BDC BT 1 0 0 -1 127.18699646 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.68699646 89.38600159 Tm [(steady)] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.23399353 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 157.73399353 89.38600159 Tm [(curves)] TJ ET EMC /P <> BDC BT 1 0 0 -1 183.83299255 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 186.33299255 89.38600159 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.66299438 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 197.16299438 89.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.38000488 89.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 104.98600006 Tm [(radica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 27.20199966 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.70199966 104.98600006 Tm [(distance)] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.4659996 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 64.96600342 104.98600006 Tm [(changes.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 99.67299652 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.17299652 104.98600006 Tm [(At)] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.17299652 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.67299652 104.98600006 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.88999939 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 129.38999939 104.98600006 Tm [(radial)] TJ ET EMC /P <> BDC BT 1 0 0 -1 152.15400696 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 154.65400696 104.98600006 Tm [(distance)] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.41799927 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.91799927 104.98600006 Tm [(from)] TJ ET EMC /P <> BDC BT 1 0 0 -1 209.35600281 104.98600006 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 120.58599854 Tm [(wafer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.75900078 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.25900078 120.58599854 Tm [(cente)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.68299866 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 52.18299866 120.58599854 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 60.51300049 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 63.01300049 120.58599854 Tm [(around)] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.78199768 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.28199768 120.58599854 Tm [(10mm,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.33899689 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.83899689 120.58599854 Tm [(both)] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.61700439 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.11700439 120.58599854 Tm [(liqui)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.45199585 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 169.95199585 120.58599854 Tm [(layer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.93699646 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.43699646 120.58599854 Tm [(thickne)1(s)-1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 229.65400696 120.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 136.18600464 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.43799973 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.93799973 136.18600464 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.15500069 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.65500069 136.18600464 Tm [(radica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.85699844 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 61.35699844 136.18600464 Tm [(veloci)1(ty)] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.56900024 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 96.06900024 136.18600464 Tm [(are)] TJ ET EMC /P <> BDC BT 1 0 0 -1 108.27600098 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 110.77600098 136.18600464 Tm [(much)] TJ ET EMC /P <> BDC BT 1 0 0 -1 132.99299622 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 135.49299622 136.18600464 Tm [(smalle)1(r)] TJ ET EMC /P <> BDC BT 1 0 0 -1 164.92700195 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.42700195 136.18600464 Tm [(than)] TJ ET EMC /P <> BDC BT 1 0 0 -1 184.64399719 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 187.14399719 136.18600464 Tm [(other)] TJ ET EMC /P <> BDC BT 1 0 0 -1 207.69099426 136.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 151.78599548 Tm [(zones)] TJ ET EMC /P <> BDC BT 1 0 0 -1 22.7689991 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 25.2689991 151.78599548 Tm [(\(radica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 55.80099869 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.30099869 151.78599548 Tm [(veloci)1(ty)] TJ ET EMC /P <> BDC BT 1 0 0 -1 90.51300049 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 93.01300049 151.78599548 Tm [(profile)] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.66799927 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.16799927 151.78599548 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 128.83799744 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 131.33799744 151.78599548 Tm [(not)] TJ ET EMC /P <> BDC BT 1 0 0 -1 144.11599731 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 146.61599731 151.78599548 Tm [(shown\).)] TJ ET EMC /P <> BDC BT 1 0 0 -1 178.55900574 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 181.05900574 151.78599548 Tm [(We)] TJ ET EMC /P <> BDC BT 1 0 0 -1 194.93600464 151.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 167.38600159 Tm [(suspected)] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.8769989 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 41.3769989 167.38600159 Tm [(that)] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.37200165 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 58.87200165 167.38600159 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.08899689 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.58899689 167.38600159 Tm [(combina)1(tion)] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.57900238 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 126.07900238 167.38600159 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 134.40899658 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 136.90899658 167.38600159 Tm [(thinner)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.23399353 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 167.73399353 167.38600159 Tm [(liqui)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.06900024 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.56900024 167.38600159 Tm [(layer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 213.55400085 167.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 182.98600769 Tm [(thickne)1(s)-1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 37.21699905 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 39.71699905 182.98600769 Tm [(and)] TJ ET EMC /P <> BDC BT 1 0 0 -1 54.15499878 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 56.65499878 182.98600769 Tm [(slower)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.31500244 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 85.81500244 182.98600769 Tm [(radica)1(l)] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.01699829 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 115.51699829 182.98600769 Tm [(veloci)1(ty)] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.72900391 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.22900391 182.98600769 Tm [(will)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.78599548 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.28599548 182.98600769 Tm [(result)] TJ ET EMC /P <> BDC BT 1 0 0 -1 190.50300598 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 193.00300598 182.98600769 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 200.78100586 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 203.28100586 182.98600769 Tm [(poor)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.61099243 182.98600769 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 198.58599854 Tm [(chemi)1(cal)] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.0890007 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.5890007 198.58599854 Tm [(wetting)] TJ ET EMC /P <> BDC BT 1 0 0 -1 68.58399963 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.08399963 198.58599854 Tm [(at)] TJ ET EMC /P <> BDC BT 1 0 0 -1 78.3010025 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 80.8010025 198.58599854 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 95.24900055 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.74900055 198.58599854 Tm [(local)] TJ ET EMC /P <> BDC BT 1 0 0 -1 117.18299866 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.68299866 198.58599854 Tm [(area,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 138.82899475 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 141.32899475 198.58599854 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 165.76699829 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.26699829 198.58599854 Tm [(consequentl)1(y)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.03100586 198.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 214.18600464 Tm [(results)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.1079998 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.6079998 214.18600464 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 36.38600159 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.88600159 214.18600464 Tm [(ball-t)1(ype)] TJ ET EMC /P <> BDC BT 1 0 0 -1 74.4280014 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.9280014 214.18600464 Tm [(defect)] TJ ET EMC /P <> BDC BT 1 0 0 -1 101.35199738 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 103.85199738 214.18600464 Tm [(deposition.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.01699829 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.51699829 214.18600464 Tm [(This)] TJ ET EMC /P <> BDC BT 1 0 0 -1 168.29499817 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 170.79499817 214.18600464 Tm [(phenomenon)] TJ ET EMC /P <> BDC BT 1 0 0 -1 222.44999695 214.18600464 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 229.78599548 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 6.67000008 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 9.17000008 229.78599548 Tm [(more)] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.71699905 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.21699905 229.78599548 Tm [(pronounced)] TJ ET EMC /P <> BDC BT 1 0 0 -1 79.4240036 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 81.9240036 229.78599548 Tm [(to)] TJ ET EMC /P <> BDC BT 1 0 0 -1 89.70200348 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 92.20200348 229.78599548 Tm [(high-viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.86700439 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 151.36700439 229.78599548 Tm [(chemi)1(cal,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.95599365 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 192.45599365 229.78599548 Tm [(such)] TJ ET EMC /P <> BDC BT 1 0 0 -1 210.78599548 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 213.28599548 229.78599548 Tm [(as)] TJ ET EMC /P <> BDC BT 1 0 0 -1 221.61599731 229.78599548 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 245.38600159 Tm [(ST250.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 29.17000008 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 31.67000008 245.38600159 Tm [(The)] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.21699905 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 49.71699905 245.38600159 Tm [(capture)1(d)] TJ ET EMC /P <> BDC BT 1 0 0 -1 84.14099884 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.64099884 245.38600159 Tm [(image)] TJ ET EMC /P <> BDC BT 1 0 0 -1 111.07499695 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 113.57499695 245.38600159 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 121.35299683 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 123.85299683 245.38600159 Tm [(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 139.69299316 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 142.19299316 245.38600159 Tm [(6\(a\))] TJ ET EMC /P <> BDC BT 1 0 0 -1 158.29200745 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.79200745 245.38600159 Tm [(also)] TJ ET EMC /P <> BDC BT 1 0 0 -1 176.8999939 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 179.3999939 245.38600159 Tm [(confirms)] TJ ET EMC /P <> BDC BT 1 0 0 -1 214.94700623 245.38600159 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 260.98599243 Tm [(this)] TJ ET EMC /P <> BDC BT 1 0 0 -1 14.44799995 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 16.94799995 260.98599243 Tm [(predict)1(ion.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 59.99000168 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 62.49000168 260.98599243 Tm [(As)] TJ ET EMC /P <> BDC BT 1 0 0 -1 73.60299683 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 76.10299683 260.98599243 Tm [(shown)] TJ ET EMC /P <> BDC BT 1 0 0 -1 102.21600342 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.71600342 260.98599243 Tm [(in)] TJ ET EMC /P <> BDC BT 1 0 0 -1 112.4940033 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.9940033 260.98599243 Tm [(Table)] TJ ET EMC /P <> BDC BT 1 0 0 -1 137.75799561 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 140.25799561 260.98599243 Tm [(1,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 147.75799561 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 150.25799561 260.98599243 Tm [(viscosity)] TJ ET EMC /P <> BDC BT 1 0 0 -1 185.81500244 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 188.31500244 260.98599243 Tm [(of)] TJ ET EMC /P <> BDC BT 1 0 0 -1 196.64500427 260.98599243 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 276.58599854 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 35.56200027 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 38.06200027 276.58599854 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 44.73199844 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 47.23199844 276.58599854 Tm [(much)] TJ ET EMC /P <> BDC BT 1 0 0 -1 69.4489975 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 71.9489975 276.58599854 Tm [(lower)] TJ ET EMC /P <> BDC BT 1 0 0 -1 94.71800232 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 97.21800232 276.58599854 Tm [(than)] TJ ET EMC /P <> BDC BT 1 0 0 -1 114.43499756 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 116.93499756 276.58599854 Tm [(ST250s,)] TJ ET EMC /P <> BDC BT 1 0 0 -1 153.32699585 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 155.82699585 276.58599854 Tm [(which)] TJ ET EMC /P <> BDC BT 1 0 0 -1 180.26499939 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 182.76499939 276.58599854 Tm [(is)] TJ ET EMC /P <> BDC BT 1 0 0 -1 189.43499756 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 191.93499756 276.58599854 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 204.1519928 276.58599854 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 292.18597412 Tm [(reason)] TJ ET EMC /P <> BDC BT 1 0 0 -1 26.09900093 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 28.59900093 292.18597412 Tm [(why)] TJ ET EMC /P <> BDC BT 1 0 0 -1 45.82099915 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 48.32099915 292.18597412 Tm [(ICS8000)] TJ ET EMC /P <> BDC BT 1 0 0 -1 83.88300323 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 86.38300323 292.18597412 Tm [(does)] TJ ET EMC /P <> BDC BT 1 0 0 -1 104.71299744 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 107.21299744 292.18597412 Tm [(not)] TJ ET EMC /P <> BDC BT 1 0 0 -1 119.99099731 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 122.49099731 292.18597412 Tm [(suffer)] TJ ET EMC /P <> BDC BT 1 0 0 -1 145.81100464 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 148.31100464 292.18597412 Tm [(the)] TJ ET EMC /P <> BDC BT 1 0 0 -1 160.52799988 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 163.02799988 292.18597412 Tm [(ball-t)1(ype)] TJ ET EMC /P <> BDC BT 1 0 0 -1 198.57000732 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 201.07000732 292.18597412 Tm [(defect)1(s)] TJ ET EMC /P <> BDC BT 1 0 0 -1 229.38499451 292.18597412 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 0 307.78598022 Tm [(\(Fig.)] TJ ET EMC /P <> BDC BT 1 0 0 -1 19.17000008 307.78598022 Tm [( )] TJ ET EMC /P <> BDC BT 1 0 0 -1 21.67000008 307.78598022 Tm [(5\).)] TJ ET EMC /P <> BDC BT 1 0 0 -1 32.5 307.78598022 Tm /GS198 gs 0 g [( )] TJ ET EMC Q Q Q 1 0 0 -1 0 841.90002441 cm endstream endobj 117 0 obj <> endobj 118 0 obj <> endobj 119 0 obj <> endobj 120 0 obj <> endobj 121 0 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FGGHI wxwx x w     -CTX !4@ !4 @ !4  ?54&&'&#``-7fMb(|7H_<&εcK*5VŪf!@9IWj j #   6FF 66Guy x xv   Su   %` !%@''p# #0##!  0"1c+N]NCz9TsA9sIs~VsUs0R9 ss9al <\VVNzj</VKS >~d0      1 E!f  ."@4 TH     >~    b` 0   * ( ( ) ) )0 )$)N)B)0)$)j)^)|)p) )))) ) ))@4 *)$ *$***4**(- *H-*< ( ()) ( ( )0 )$ 2015 The Monotype Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Arial is a trademark of The Monotype Corporation.Monotype:Arial Bold (Microsoft)Version 6.90Arial-BoldMT 2015 The Monotype Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Monotype Type Drawing Office - Robin Nicholas, Patricia Saunders 1982You may use this font as permitted by the EULA for the product in which this font is included to display and print content. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 2015 The Monotype Corporation. All Rights Reserved. Hebrew OpenType Layout logic copyright 2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.Arial is a trademark of The Monotype Corporation.Monotype:Arial Bold (Microsoft)Version 6.90Arial-BoldMTMonotype Type Drawing Office - Robin Nicholas, Patricia Saunders 1982You may use this font as permitted by the EULA for the product in which this font is included to display and print content. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.Arial NegretaArial tunArial fedArial FettArial Arial is a trademark of The Monotype Corporation.You may use this font as permitted by the EULA for the product in which this font is included to display and print content. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions: The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software. THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. 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